The formation of nanosize silicides films by implantation of B, P, Ba, and alkali metal atoms in Si(111) and Si(100) followed by thermal annealing is studied by electron spectroscopy and slow electron dif fraction methods. It is shown that implantation of ions with a large dose D > 10 16 cm -2 and short term heating lead to the formation of thin silicides films with new surface superstructures: Si(111)-( × )R30°-B, Si(100)-2 × 2Ba, Si(111)-1 × 1P, etc.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.