On-machine shape measurement of workpiece surface with Fizeau interferometer

Nomura, Takashi; Yoshikawa, Kunihiko; Tashiro, Hatsuzo; Takeuchi, Kiyomatsu; Ozawa, Norimitsu; Okazaki, Yuichi; Suzuki, Masane; Kobayashi, Fumio; Usuki, Masao

doi:10.1016/0141-6359(92)90004-g

Cited by 10 publications

(7 citation statements)

References 9 publications

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“…In a Fizeau interferometer, the reference path is common with the measurement path, except for the non-common measurement path that is twice the surface separation between the reference flat and the workpiece. In an ex-situ measurement, a nearly common-path configuration is typically taken by setting a small surface separation, which makes it easier to achieve a stable interferogram than other types of interferometers [181]. Fig.…”

Section: On-machine Full-field Systems For Surface Formmentioning

confidence: 99%

“…Fig. 9 shows one of the first on-machine applications of interferometry by using a Fizeau configuration [181]. The interferometer was mounted at a position on the machine bed to measure the diamond-turned flat workpiece.…”

Section: On-machine Full-field Systems For Surface Formmentioning

confidence: 99%

“…On-machine surface form interferometry Schematic of a Fizeau interferometer on a diamond turning machine (modified from[181]). …”

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confidence: 99%

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On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed.

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Section: On-machine Full-field Systems For Surface Formmentioning

confidence: 99%

Section: On-machine Full-field Systems For Surface Formmentioning

confidence: 99%

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On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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“…First, most commercial optical interferometers can conduct surface measurement appropriately in a well-controlled environment but cannot be applicable to manufacturing sites, where the measurement process suffers from environmental noise and mechanical vibration. Some on-machine measurement instruments based on optical interferometry have been developed to address this problem [26][27][28][29]. In this way, surface measurement can be implemented on the machine tool or even in the manufacturing process without removing or remounting the workpiece [30,31].…”

Section: Introductionmentioning

confidence: 99%

Development of surface reconstruction algorithms for optical interferometric measurement

2020

Front. Mech. Eng.

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Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, on-machine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.

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“…(1) procedure to measure topography The scanning route is shown in Figure 5. (1) procedure to measure topography The scanning route is shown in Figure 5.…”

Section: Introductionmentioning

confidence: 99%