Development of surface reconstruction algorithms for optical interferometric measurement

Abstract

Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, on-machine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.

Future of precision manufacturing: Integrating advanced metrology and intelligent monitoring for process optimization

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The trend of structured light-induced force microscopy: a review

“…Given the special scenario of structured light-structured matter interaction at the nanoscale, one important question is how to characterize or exploit such a scenario in practice. Previous studies on this topic have been primarily focused on farfield/nearfield imaging or spectroscopy [58,[104][105][106], and have already been widely applied to enhance feature (edge, contrast, etc) contrast for optical microscopy [41,52,69], enabling multi-dimensional multiplexing holography [33,42,107], interferometric surface topography sensing [108], etc. Here, we take particular interest in optical force as an important means to detect general structured light-structured matter interaction.…”

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