On-chip Hot Spot Remediation with Miniaturized Thermoelectric Coolers

Bar‐Cohen, Avram; Wang, Peng

doi:10.1007/s12217-009-9162-4

Cited by 48 publications

(17 citation statements)

References 17 publications

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“…Many advances in the fabrication of microscopic TE devices combined with microelectromechanical systems processing have been achieved in recent years. However, there are still some important problems that have limited the performance and application of TE micro-devices; for instance, the complex mic-fabrication process, the quality of TE materials including thin films and microarrays, the aspect ratio of microarrays, and contact resistance [3,9,10,12,14,18,19,20,21,22,23,24,25,26]. …”

Section: Introductionmentioning

confidence: 99%

Electrodeposition of p-Type Sb2Te3 Films and Micro-Pillar Arrays in a Multi-Channel Glass Template

Guo

et al. 2018

Materials

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Antimony telluride (Sb2Te3)-based two-dimensional films and micro-pillar arrays are fabricated by electrochemical deposition from electrolytes containing SbO+ and HTeO2+ on Si wafer-based Pt electrode and multi-channel glass templates, respectively. The results indicate that the addition of tartaric acid increases the solubility of SbO+ in acidic solution. The compositions of deposits depend on the electrolyte concentration, and the micro morphologies rely on the reduction potential. Regarding the electrolyte containing 8 mM of SbO+ and 12 mM of HTeO2+, the grain size increases and the density of films decreases as the deposition potential shifts from −100 mV to −400 mV. Sb2Te3 film with nominal composition and dense morphology can be obtained by using a deposition potential of −300 mV. However, this condition is not suitable for the deposition of Sb2Te3 micro-pillar arrays on the multi-channel glass templates because of its drastic concentration polarization. Nevertheless, it is found that the pulsed voltage deposition is an effective way to solve this problem. A deposition potential of −280 mV and a dissolve potential of 500 mV were selected, and the deposition of micro-pillars in a large aspect ratio and at high density can be realized. The deposition technology can be further applied in the fabrication of micro-TEGs with large output voltage and power.

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Section: Introductionmentioning

confidence: 99%

Electrodeposition of p-Type Sb2Te3 Films and Micro-Pillar Arrays in a Multi-Channel Glass Template

Guo

et al. 2018

Materials

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“…Nowadays, there are several effective techniques for cooling of local hot spots such as spray cooling [3], boiling in microchannels [4], thermoelectric coolers [5]. One of the promising methods for removing such high heat fluxes from a spotted heat source is technology based on evaporation of a thin liquid layer.…”

Section: Introductionmentioning

confidence: 99%

Breakdown dynamics of a horizontal evaporating liquid layer when heated locally

Spesivtsev

2017

EPJ Web Conf.

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Abstract. Breakdown of liquid layer when heated from a localized hot spot was investigated experimentally. Water and ethanol were used as working liquids with a layer thickness of 300 μm. Basic steps of the breakdown process were found and mean velocities of the dry spot formation were determined. The formation of residual layer over the hotspot before the breakdown has been found for both liquids. The creation of a droplet cluster near the heating region is observed when using water as a working fluid. It was shown that evaporation is one of the general factors influencing the process of layer breakdown and dry spot formation as well as thermocapillary effect.

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“…When the microprocessor is cooled, the local heat flux is estimated at 1 kW/cm 2 [1]. A twophase flow in a channel is promising solution of this problem.…”

Section: Introductionmentioning

confidence: 99%