“…The unique properties of SLcam r make it ideal for, e.g. TXRF applications where detailed information on X-ray beam propagation and shadowing effects can be measured [16] and analyzed with appropriate models [18] . The first successful installation of SLcam r at PIXE facility was recently realized at High-Speed PIXE beamline at Ion Beam Center at Helmholtz-Zentrum Dresden-Rossendorf.…”
Section: Discussionmentioning
confidence: 99%
“…The first sample (see Figure 4) is a picoliter droplet of Ni solution [16] . The droplet was measured at synchrotron facility in TXRF geometry and with 8:1 magnifying optics.…”
Section: Real Samplesmentioning
confidence: 99%
“…Also a clear increase of the XRF intensity at the left slope of the droplet and shadowing in the center is visible. It should be noted that the beam footprint in TXRF measurements is in the range of millimeters [5] ; thus, TXRF imaging with comparable resolution would not be possible in case of scanning methods [15,16] . Figure 5 shows an image of a RAM chip cross-section performed with an X-ray tube used for excitation.…”
We present results of recent development of the color X-ray camera, type SLcam r , allowing detection of X-ray images with few microns resolution. Such spectral resolution is achieved with the use of high-quality polycapillary optics combined with sub-pixel resolution. Imaging of Siemens star resolution test chart reveals that the resolution limit of SLcam r can go down to nearly 5 m. Several real sample examples of measurements carried out at the laboratory, synchrotron, and particle-induced X-ray emission beamlines are shown. This is the first time SLcam r is used as particle-induced X-ray emission detector.
“…The unique properties of SLcam r make it ideal for, e.g. TXRF applications where detailed information on X-ray beam propagation and shadowing effects can be measured [16] and analyzed with appropriate models [18] . The first successful installation of SLcam r at PIXE facility was recently realized at High-Speed PIXE beamline at Ion Beam Center at Helmholtz-Zentrum Dresden-Rossendorf.…”
Section: Discussionmentioning
confidence: 99%
“…The first sample (see Figure 4) is a picoliter droplet of Ni solution [16] . The droplet was measured at synchrotron facility in TXRF geometry and with 8:1 magnifying optics.…”
Section: Real Samplesmentioning
confidence: 99%
“…Also a clear increase of the XRF intensity at the left slope of the droplet and shadowing in the center is visible. It should be noted that the beam footprint in TXRF measurements is in the range of millimeters [5] ; thus, TXRF imaging with comparable resolution would not be possible in case of scanning methods [15,16] . Figure 5 shows an image of a RAM chip cross-section performed with an X-ray tube used for excitation.…”
We present results of recent development of the color X-ray camera, type SLcam r , allowing detection of X-ray images with few microns resolution. Such spectral resolution is achieved with the use of high-quality polycapillary optics combined with sub-pixel resolution. Imaging of Siemens star resolution test chart reveals that the resolution limit of SLcam r can go down to nearly 5 m. Several real sample examples of measurements carried out at the laboratory, synchrotron, and particle-induced X-ray emission beamlines are shown. This is the first time SLcam r is used as particle-induced X-ray emission detector.
“…A study of a fundamental topic was presented by Fittschen et al 64 who addressed the problem of absorption effects and the impact of specimen shape on TXRF analysis. Model calculations indicated that a ring-shaped specimen should give better results in terms of higher counts per mass, compared with a lled rectangle or circle shaped samples.…”
This review covers developments in and applications of XRF techniques such as EDXRF, WDXRF, TXRF, XRF microscopy using technologies such as synchrotron sources, X-ray optics, X-ray tubes and detectors in laboratory, mobile and hand-held systems.
“…A correct interpretation of the angular profiles of intermediate structures is of prime importance, in particular for investigation of nanostructures and for TXRF measurements of droplets where the quantification problem is one of the main issues [45].…”
Section: Motivation and Basic Principlesmentioning
Various 3-dimensional nano-scaled periodic structures with different configurations and periods deposited on the surface of silicon and silica substrates were investigated by means of the grazing incidence and grazing emission X-ray fluorescence techniques. Apart from the characteristics which are typical for particle-and layer-like samples, the measured angular intensity profiles show additional periodicity-related features. The latter could be explained by a novel theoretical approach based on simple geometrical optics (GO) considerations. The new GO-based calculations were found to yield results in good agreement with experiment, also in cases where other theoretical approaches are not valid, e.g., periodic particle distributions with an increased surface coverage.
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