2014
DOI: 10.1016/j.sab.2014.03.015
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Grazing angle X-ray fluorescence from periodic structures on silicon and silica surfaces

Abstract: Various 3-dimensional nano-scaled periodic structures with different configurations and periods deposited on the surface of silicon and silica substrates were investigated by means of the grazing incidence and grazing emission X-ray fluorescence techniques. Apart from the characteristics which are typical for particle-and layer-like samples, the measured angular intensity profiles show additional periodicity-related features. The latter could be explained by a novel theoretical approach based on simple geometr… Show more

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Cited by 20 publications
(19 citation statements)
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“…The thin slab applied in the simulation allows more light transmissions above the Si absorption threshold energy, leading to lower backward reflection (Nowak et al 2014). As for the coated surfaces, it is noticed a large absorption below 400 nm happens on the NOA 63 photopolymer surface, but not so on the SiO2 one in the simulation model.…”
Section: Morphologymentioning
confidence: 93%
“…The thin slab applied in the simulation allows more light transmissions above the Si absorption threshold energy, leading to lower backward reflection (Nowak et al 2014). As for the coated surfaces, it is noticed a large absorption below 400 nm happens on the NOA 63 photopolymer surface, but not so on the SiO2 one in the simulation model.…”
Section: Morphologymentioning
confidence: 93%
“…Interference fringes can also be observed for articial nanostructures on the top of a substrate in the GEXRF and GIXRF intensity proles. [60][61][62] Note, that for the considered ion-implanted samples no interference fringes will show up in the angular intensity proles since there is only one refraction interface for the incident, respectively emitted X-rays (the sample surface itself) and since the XRF signal originates from below the refracting interface. A further experimental difference between GIXRF and GEXRF is given by a different sensitivity of the sample matrix to the respective Xray energy of interest, the difference being pronounced by the long emission, respectively incidence paths.…”
Section: Introductionmentioning
confidence: 99%
“…Combining GIXRF with near edge X-ray absorption fine structure (NEXAFS) measurements on a sample containing a Ti/Ti 2 O 3 layer provided besides depth information also information on the binding status of titanium. [111][112][113][114][115][116][117][118][119][120].…”
Section: Surface and Thin-layer Analysismentioning
confidence: 99%