2022
DOI: 10.1063/5.0088701
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Observation of dislocations in thick β-Ga2O3 single-crystal substrates using Borrmann effect synchrotron x-ray topography

Abstract: We performed Borrmann effect x-ray topography (XRT) to observe dislocations and other structural defects in a thick β-Ga2O3 (001) substrate. The Borrmann effect was realized by working in a symmetrical Laue geometry ( g = 020). Anomalous transmission occurred under the exact Bragg condition, producing a strong diffraction beam that allowed us to image defects across the entire thickness of the substrate. The analysis clearly revealed straight b-axis screw-type and curved dislocations and allowed assessing the … Show more

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Cited by 10 publications
(2 citation statements)
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“…Maps of maximum intensity, peak position, and full width at half maximum (FWHM) were then constructed 29 from the images using a homemade program. XRR and XRT images were also recorded on X‐ray films (Agfa Structurix D2) to analyze the misorientation and the dislocations nucleated at the DBs 22 in detail.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Maps of maximum intensity, peak position, and full width at half maximum (FWHM) were then constructed 29 from the images using a homemade program. XRR and XRT images were also recorded on X‐ray films (Agfa Structurix D2) to analyze the misorientation and the dislocations nucleated at the DBs 22 in detail.…”
Section: Methodsmentioning
confidence: 99%
“…This requires several key technologies to suppress the generation of lattice defects. Typical lattice defects in bulk substrates include dislocations, [12][13][14][15][16] stacking faults, [17][18][19] voids, 10,[20][21][22] and domain boundaries (DBs). 6 Compared to the other three major defect types, DB has drawn little attention from researchers.…”
Section: Introductionmentioning
confidence: 99%