Abstract. A data processing method is presented making it possible to determine thin film thickness from GDOS depth profiles. It consists of fitting a piece-wise linear function to the depth profile and in using positions (abscissae) of their knots as parameters which are proportional to film thickness. For thickness calibration, such a linear combination of these parameters is used, which gives minimum variation coefficient of the residuals between the real and the estimated thickness of calibration samples. Relative error lower than 3% was obtained in calibration using 4 samples with nickel film thickness ranging from 0.1 to 8.3 ~tm, each analyzed four times.