Thickness determination from the GDOS depth profiles using piece-wise linear model functions

Weiss, Jindřich; Weiss, Zdeněk

doi:10.1007/bf01772357

Cited by 2 publications

(1 citation statement)

References 12 publications

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“…Using different techniques a mathematical description of crater effects in glow discharges was up to now only possible in few very special cases with varying success [4][5][6][7]. That is in our opinion due to the following.…”

Section: Introductionmentioning

confidence: 86%

Quantitative depth profiling in glow discharge spectroscopies ? A new deconvolution technique to separate effects of an uneven erosion crater shape

Präßler

Hoffmann

Schumann

et al. 1996

Analytical and Bioanalytical Chemistry

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An algorithm is presented as a concept for the quantification in direct current and radiofrequency glow discharge (GD) modes for GD optical emission spectroscopy. The algorithm is divided into excitation and sputtering part and thus it is possible to distinguish between the different excitation processes and to consider equivalent sputtering crater formations in both modes. Intensity-time profiles are affected corresponding to the method by several effects. One important effect is that sputtering occurs at a single time in different depths because of curved crater bottoms, this is usually called crater effect. The main purpose is to introduce an iterative deconvolution technique which for the quantification numerically takes into account the curved sputtering crater bottom. Input data for the deconvolution technique are the calibrated mass-time profile, the partial densities of the sample constituents and the measured final shape of the sputtering crater. Using a relatively simple model for ion sputtering the deconvolution technique improves iteratively the calculated layer structure by means of information on crater formation. The mathematical handling is illustrated for the quantification of a depth profile of a multilayer sample of ten 100 nm layers. The resulting concentration-depth profile reflects excellently the real elemental distribution of the multilayer system.

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Section: Introductionmentioning

confidence: 86%

Quantitative depth profiling in glow discharge spectroscopies ? A new deconvolution technique to separate effects of an uneven erosion crater shape

Präßler

Hoffmann

Schumann

et al. 1996

Analytical and Bioanalytical Chemistry

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Recent Characterization of Steel by Surface Analysis Methods

Suzuki

1996

Tetsu-to-Hagane

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Recent Characterization of Steel by Surface Analysis Methods Shigeru SUZUKI Synopsis : Surface analysis methods, such as Auger electron spectroscopy, X-ray photoelectron spectroscopy, secondary ion mass spectrometry, glow discharge optical emission spectrometry and so on, have become indispensable to characterize surface and interface of many kinds of steel. Although a number of studies on characterization of steel by these methods have been carried out, several problems still remain in quantification and depth profiling. Nevertheless, the methods have provided essential information on the concentration and chemical state of elements at the surface and interface. Recent results on characterization of oxide layers, coated films, etc. on the surface of steel are reviewed here.

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Thickness determination from the GDOS depth profiles using piece-wise linear model functions

Cited by 2 publications

References 12 publications

Quantitative depth profiling in glow discharge spectroscopies ? A new deconvolution technique to separate effects of an uneven erosion crater shape

Quantitative depth profiling in glow discharge spectroscopies ? A new deconvolution technique to separate effects of an uneven erosion crater shape

Recent Characterization of Steel by Surface Analysis Methods

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