2007
DOI: 10.1002/crat.200711004
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Numerical investigation of crystal growth process of bulk Si and nitrides – a review

Abstract: Heat and mass transfer during crystal growth of bulk Si and nitrides by using numerical analysis was studied. A three-dimensional analysis was carried out to investigate temperature distribution and solid-liquid interface shape of silicon for large-scale integrated circuits and photovoltaic silicon. The analysis enables prediction of the solid-liquid interface shape of silicon crystals. The result shows that the interface shape became bevel like structure in the case without crystal rotation. We also carried o… Show more

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Cited by 5 publications
(3 citation statements)
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“…The developed simulator has been used successfully in quantitatively predicting the 3D features of a crystal growth. It has also been applied to a variety of crystal growth processes, such as solution growth for GaN [12,13], the PVT method for SiC [14,15], CZ growth, and DS processes for Si crystals [10,11,[16][17][18][19][20][21][22]. To improve the efficiency and accuracy of the global simulation, we also develop a structured/unstructured combined mesh scheme.…”
Section: Introductionmentioning
confidence: 99%
“…The developed simulator has been used successfully in quantitatively predicting the 3D features of a crystal growth. It has also been applied to a variety of crystal growth processes, such as solution growth for GaN [12,13], the PVT method for SiC [14,15], CZ growth, and DS processes for Si crystals [10,11,[16][17][18][19][20][21][22]. To improve the efficiency and accuracy of the global simulation, we also develop a structured/unstructured combined mesh scheme.…”
Section: Introductionmentioning
confidence: 99%
“…The simulation code has also been successfully been used for a variety of crystal growth processes, such as solution growth for GaN (13,14), PVT method for SiC (15,16), and CZ growth and directional solidification processes for Si crystals (11,12,(17)(18)(19)(20)(21)(22)(23). In this paper, application of the simulator to a CZ growth process and a directional solidification process for Si crystals, the two major production methods for crystalline Si for solar cells, is introduced.…”
Section: Introductionmentioning
confidence: 99%
“…The developed simulator has successfully been used to quantitatively predict the 3D features of a crystal growth. It has also successfully been used for a variety of crystal growth processes, such as solution growth for GaN [14,15], PVT method for SiC [16,17], CZ growth and directional solidification processes for Si crystals [12,13,[18][19][20][21][22][23][24]. In this paper, the application of the simulator to a CZ growth process and a directional solidification process for Si crystals, the two major production methods for crystalline Si for solar cells, is introduced.…”
mentioning
confidence: 99%