Numerical Analysis of a Long Period Waveguide Grating Sensor

Kusko, Mihaela; Rebigan, R.; Cristea, Dana

doi:10.1109/smicnd.2006.283956

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2007

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“…The sensitivity increases with the grating height, but the sensor response maintains the same trend for the same value of the core thickness. Both from the theoretical point of view, and the fabrication process, the sensitivity of the sensor may be increased by fabricating a larger grating height or grating region length [8].…”

Section: Fabrication Processesmentioning

confidence: 99%

Design and Proposed Technological Flow of an Y-Splitter Waveguide Grating Sensor

Rebigan

Kusko

Avram

et al. 2007

2007 International Semiconductor Conference

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The paper presents the design and fabrication of an Y-splitter wvaveguide grating sensor for-measuring the refractive index variation of the surrounding mediunm. The sensor consists of a SU8 waveguide Y-splitter on silicon dioxide buffer layer grown on a silicont substrate. The anmount of radiation coupled from the waveguide into the silicon substrate due to the grating depends on the different values of the surrouinding medium refractive index.

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Section: Fabrication Processesmentioning

confidence: 99%