Design and Proposed Technological Flow of an Y-Splitter Waveguide Grating Sensor

Abstract

The paper presents the design and fabrication of an Y-splitter wvaveguide grating sensor for-measuring the refractive index variation of the surrounding mediunm. The sensor consists of a SU8 waveguide Y-splitter on silicon dioxide buffer layer grown on a silicont substrate. The anmount of radiation coupled from the waveguide into the silicon substrate due to the grating depends on the different values of the surrouinding medium refractive index.