NOx sensing properties of In2O3 nanoparticles prepared by metal organic chemical vapor deposition

Wang, Ch. Y.; Ali, Muhammad Asım; Kups, Thomas; Röhlig, C.-C.; Cimalla, V.; Stauden, Thomas; Ambacher, O.

doi:10.1016/j.snb.2007.10.015

Cited by 61 publications

(29 citation statements)

References 22 publications

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“…6(b)). The limit of detection, based on signal-to-noise ratio of 3, was found to be 12 ppb, which is much lower than that reported in the literature [25]. Moreover, the response time (t 95 ), defined as the time required to reach the 95% of the stable response to NO x gas, and the recovery time (t 95 ), defined as the time required to reach the 95% of the baseline, for the sensor to detect 7.8 ppm were about 3.5 and 45 min, respectively (see Fig.…”

Section: No X Sensing and Interferencecontrasting

confidence: 60%

“…Moreover, the response time (t 95 ), defined as the time required to reach the 95% of the stable response to NO x gas, and the recovery time (t 95 ), defined as the time required to reach the 95% of the baseline, for the sensor to detect 7.8 ppm were about 3.5 and 45 min, respectively (see Fig. 6(c)), which are comparable with some In 2 O 3 based NO x gas sensors [25,26]. The long response time and recovery time could be resulted from the low operation temperature [26] and/or the nature of the thick sensing film [27].…”

Section: No X Sensing and Interferencesupporting

confidence: 57%

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Fabrication of NOx gas sensors using In2O3–ZnO composite films

Lin

Fang

Lin

et al. 2010

Sensors and Actuators B: Chemical

110

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Section: No X Sensing and Interferencecontrasting

confidence: 60%

Section: No X Sensing and Interferencesupporting

confidence: 57%

Fabrication of NOx gas sensors using In2O3–ZnO composite films

Lin

Fang

Lin

et al. 2010

Sensors and Actuators B: Chemical

110

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“…These intriguing characteristics make the structures potentially good candidates for chemoresistive gas sensors, reducing instabilities, suffering from their polycrystalline nature associated with grain coalescence and drift in electrical properties [7][8][9]. In spite of such benefits, also in this bottom-up approach many problems remain unsolved, such as poor repeatability due to a scarce control in the growth.…”

Section: Introductionmentioning

confidence: 99%

Development and Fabrication of TiO2 Tip Arrays for Gas Sensing

Hotovy¹,

Kostič²,

Hascik³

et al. 2011

Journal of Electrical Engineering

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Titanium oxide thin films were deposited at room temperature by reactive magnetron sputtering in a mixture of oxygen and argon on oxidized silicon substrates. The optimal etching characteristics of TiO 2 films by reactive ion etching (RIE) and RIE with inductively coupled plasma source (ICP) were investigated. Patterning of TiO 2 tip arrays by electron beam lithography and dry etching were developed. Different spot sizes 200 and 500 nm in diameter and with spacing 500 and 1000 nm were investigated with regards to the minimal size and the pyramidal shape. Experimental results have shown that the exposure dose optimization wa a significant parameter for controlling the tip size and its shape. We successfully fabricated the pyramidal TiO 2 tip arrays over an 1×1 mm 2 area. The TiO 2 tip array can be expected to have an important application in gas microsensors.

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“…Metal oxide nanostructures have been demonstrated to be highly sensitive to CO [2], NH 3 [3], H 2 [4], NO x [5], as well as to ethanol [6]. Among 2 them, the detection of CO as one of the major pollutants in the automobile exhaust gases has attracted much interest.…”

Section: Introductionmentioning

confidence: 99%

Oxidation behaviour of carbon monoxide at the photostimulated surface of ZnO nanowires

Wang

Kinzer

Youn

et al. 2011

J. Phys. D: Appl. Phys.

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Dear Editor of the Journal of Physics D: Applied Physics:We are very thankful for the advises from the reviewers and the editor. The manuscript (Article ID: D/393066/PAP) has already been revised according to the comments (resubmitted online).Following are the comments and the answers, corresponding the second referee's report: "I find the paper to be well written,…, I recommend this paper for publication." We appreciate your taking time to review the manuscript and your commendation.corresponding the third referee's report: Comment #1: "In the Introduction, the authors should include some references dealing with room temperature sensors based on UV-activation of metal oxide nanowires…" Answer #1: Some references about the UV-activation of nanostructured materials have now been given in the introduction: "Thus, the photostimulated sensor, in particular based on nanostructured materials [15], enables gas detection at room temperature, resulting in a reduced power consumption [16]." Comment #2: "… why is there no particle seed formation on the bare Si in between the Au lines" Answer #2: The growth mechanism has been shortly explained in the text and a literature has been given: "The self-assembled monolayers (SAMs) of MPA, possessing two functional groups, namely, thiol and carboxylic acid, were selectively formed on the gold lines and used to discriminate between Au and Si surface as well as to interact with cationic Zn species in the solution phase. The growth mechanism has been explained in our previous work [14]." Comment #3: "Why is there no Au-supported growth on the metal lines without the particle layer at the high temperatures used. Can it be ruled out" Answer #3: The ZnO nanowires have been grown based not on the vapour-liquid-solid (VLS) but on the vapour-solid (VS) principle. Furthermore, we have not found any Au particles on the top of the ZnO nanowires.Comment #4: "Authors should provide information how the electrical responses are extracted…" Answer #4: The reviewer is right. The information of the electrical measurements is missing. Two sentences have been added in the experimental section: "Two electrical contacts were brought onto the two outer Au-lines. The electrical resistance of the ZnO nanowires between the Au-lines were determined during the sensing experiment, while the UV LED was regularly switched on and off for photostimulation and CO oxidation, respectively." Comment #5: "page 8 line 4 absorbed should read as adsorbed" Answer #5: The word in the text has been changed to be "adsorbed".Comment #6: "The non-equilibrium conditions with desorption of gaseous species at low pressure and inert gases are not close to realistic conditions in the environment. The authors should comment how this technique can lead to an operating room temperature sensor as stated in the manuscript" Answer #6: That's totally right. The measuring conditions described in this work are not close to normal realistic conditions in the environment which contains high concentration oxygen/water vapor as main interfering ...

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NOx sensing properties of In2O3 nanoparticles prepared by metal organic chemical vapor deposition

Cited by 61 publications

References 22 publications

Fabrication of NOx gas sensors using In2O3–ZnO composite films

Fabrication of NOx gas sensors using In2O3–ZnO composite films

Development and Fabrication of TiO2 Tip Arrays for Gas Sensing

Oxidation behaviour of carbon monoxide at the photostimulated surface of ZnO nanowires

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