Novel SU-8 based vacuum wafer-level packaging for MEMS devices

Murillo, Gonzalo; Davis, Zachary; Keller, Stephan Sylvest; Abadal, G.; Agustı́, Jordi; Cagliani, Alberto; Noeth, Nadine-Nicole; Boisen, Anja; Barniol, N.

doi:10.1016/j.mee.2009.12.048

Cited by 28 publications

(23 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Figure 4 shows both the measurement results and the cross-sectional SEM image of the bulk device with SU-8 encapsulation. The bulk device switches from HRS to LRS in the range from 2.5 V to 3.5 V; and from LRS to HRS in the range from 4.5 V to 5.5 V. Interestingly, the device On/ Off ratio in Figure 4 is above 10,6 which is even larger than the On/Off ratio measured in vacuum (Figure 1(b)). 11 The resistive switching of bulk SiO 2 devices with SU-8 encapsulation in air ambient demonstrates that reversible switching does not require vacuum conditions or a non-oxidizing ambient.…”

mentioning

confidence: 76%

“…The spun-on SU-8 photoresist meets this requirement and has been used in various circumstances for hermetic sealing purposes. 10 With proper planarization to reduce topography, other common materials (e.g., silicon nitride silicon oxynitride) may serve the same hermetic encapsulation role. 21,22 The SU-8 2002 photoresist ($2 lm thick) was applied to the sample to ensure full coverage of the top surface, followed by prebake at 95 C a)…”

mentioning

confidence: 99%

See 1 more Smart Citation

Discussion on device structures and hermetic encapsulation for SiOx random access memory operation in air

Zhou

Chang

Wang

et al. 2014

Applied Physics Letters

View full text Add to dashboard Cite

show abstract

mentioning

confidence: 76%

mentioning

confidence: 99%

Discussion on device structures and hermetic encapsulation for SiOx random access memory operation in air

Zhou

Chang

Wang

et al. 2014

Applied Physics Letters

View full text Add to dashboard Cite

show abstract

“…One is a glass plate and the other is a FDTS-coated glass plate via molecular vapor deposition. 52 FDTS stands for Cl 3 Si(CH 2 ) 2 (CF 2 ) 7 CF 3 .…”

Section: Methodsmentioning

confidence: 99%

Gyroid Nanoporous Membranes with Tunable Permeability

Li¹,

Schulte²,

Clausen³

et al. 2011

ACS Nano

102

View full text Add to dashboard Cite

Understanding the relevant permeability properties of ultrafiltration membranes is facilitated by using materials and procedures that allow a high degree of control on morphology and chemical composition. Here we present the first study on diffusion permeability through gyroid nanoporous cross-linked 1,2-polybutadiene (1,2-PB) membranes with uniform pores that, if needed, can be rendered hydrophilic. The gyroid porosity has the advantage of isotropic percolation with no need for structure prealignment. Closed (skin) or opened (nonskin) outer surface can be simply realized by altering the interface energy in the process of membrane fabrication. The morphology of the membranes' outer surface was investigated by scanning electron microscopy, contact angle, and X-ray photoelectron spectroscopy. The effective diffusion coefficient of glucose decreases from nonskin, to one-sided skin to two-sided skin membranes, much faster than expected by a naive resistance-in-series model; the flux through the two-sided skin membranes even increases with the membrane thickness. We propose a model that captures the physics behind the observed phenomena, as confirmed by flow visualization experiments. The chemistry of 1,2-PB nanoporous membranes can be controlled, for example, by hydrophilic patterning of the originally hydrophobic membranes, which allows for different active porosity toward aqueous solutions and, therefore, different permeability. The membrane selectivity is evaluated by comparing the effective diffusion coefficients of a series of antibiotics, proteins, and other biomolecules; solute permeation is discussed in terms of hindered diffusion. The combination of uniform bulk morphology, isotropically percolating porosity, controlled surface chemistry, and tunable permeability is distinctive for the presented gyroid nanoporous membranes.

show abstract

“…The mechanism of differential pressure is a well known method in microfluidic fluid flow impulsion, where the use of epoxy resins such as SU-8 opens up new possibilities for the implementation of pressure-driven flow on-chip. Although polymers are typically several orders of magnitude more permeable to gas leakages than glass or metals, epoxy resins are characterized by a low gas permeability and thus can be used for simple and low-cost sealing of packages Murillo et al (2010). In addition to this, SU-8 epoxy shows a decrease in gas permeability when the level of crosslinking is increased, being a suitable and interesting alternative for pressurized or vacuum microchambers fabrication Metz et al (2004).…”

Section: Pressure Chambersmentioning

confidence: 99%