Novel polysilicon comb actuators for xy-stages

Jaecklin, V. P.; Linder, Christian; Rooij, N. F. de; Moret, J.-M.; Bischof, Robert; Rudolf, Florian

doi:10.1109/memsys.1992.187707

Cited by 30 publications

(17 citation statements)

References 7 publications

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“…27 The small form factor of on-chip actuators permits their use inside analytical chambers such as SEMs and TEMs, but the force and motion they can generate are limited, which makes them prohibitive for use with samples that allow for large stretch ratios. 28,29 Recently, Samuel et al reported on mechanical testing of pyrolyzed polymer nanofibers. 30 They also utilized a microdevice with a leafspring load cell, which was actuated externally with a piezomotor.…”

Section: Introductionmentioning

confidence: 99%

Novel method for mechanical characterization of polymeric nanofibers

Naraghi

Chasiotis

Kahn

et al. 2007

Review of Scientific Instruments

124

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A novel method to perform nanoscale mechanical characterization of highly deformable nanofibers has been developed. A microelectromechanical system ͑MEMS͒ test platform with an on-chip leaf-spring load cell that was tuned with the aid of a focused ion beam was built for fiber gripping and force measurement and it was actuated with an external piezoelectric transducer. Submicron scale tensile tests were performed in ambient conditions under an optical microscope. Engineering stresses and strains were obtained directly from images of the MEMS platform, by extracting the relative rigid body displacements of the device components by digital image correlation. The accuracy in determining displacements by this optical method was shown to be better than 50 nm. In the application of this method, the mechanical behavior of electrospun polyacrylonitrite nanofibers with diameters ranging from 300 to 600 nm was investigated. The stress-strain curves demonstrated an apparent elastic-perfectly plastic behavior with elastic modulus of 7.6± 1.5 GPa and large irreversible strains that exceeded 220%. The large fiber stretch ratios were the result of a cascade of periodic necks that formed during cold drawing of the nanofibers.

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Section: Introductionmentioning

confidence: 99%

Novel method for mechanical characterization of polymeric nanofibers

Naraghi

Chasiotis

Kahn

et al. 2007

Review of Scientific Instruments

124

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“…Another factor influencing this mode of failure is the tether geometry, which is typically classified into three categories: 1) straight clamped-clamped beams; 2) crab-leg flexures; and 3) folded-beam flexures [21], [28]. In general, for the same width and length of tethers, crab-leg tethers and folded-beam flexures provide less lateral stiffness compared to straight clamped-clamped beams.…”

Section: A Factors Limiting the Maximum Comb-drive Output Force And mentioning

confidence: 99%

Optimization of Comb-Driven Devices for Mechanical Testing of Polymeric Nanofibers Subjected to Large Deformations

Naraghi

Chasiotis

2009

J. Microelectromech. Syst.

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Comb-driven electrostatic actuators applied to mechanical testing of nanostructures are usually designed by a "brute-force" approach for maximum electrostatic-force output, which results in limited actuation range. This issue is more prevalent when testing soft nanofibers with large ductility. In this paper, the design considerations for a comb-driven platform for nanoscale mechanical testing of ductile nanofibers subjected to 50%, or larger, inelastic extensions are presented. The optimization carried out aimed at increasing the net-force output by comb drives with clamped-clamped tethers, which also improves on the accuracy in the calculation of the force that is applied onto the nanofiber specimens. At large actuator motions, tethers of low bending stiffness increased the net force applied to a nanofiber and provided better accuracy in the calculation of the applied force. On the contrary, at small actuator motions, the maximum net-force output by the comb drives increased with the axial tether stiffness due to the associated increase in the pull-in-instability voltage. The fabricated surface-micromachined devices enabled experiments with individual electrospun polyacrylonitrile nanofibers at a maximum force of 30 µN and extensions up to 60%. The force output calculated from the voltage input to the electrostatic devices was compared to direct measurements by an independent optical method.[2008-0252]

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“…This work will accelerate the adoption of UE linkages into DP bearings, as designers can now quickly analyze the tradeoffs associated with their use, even for large displacement applications. This offers the potential for improving bearing performance via reduced error motion, improved dynamics and greater bearing stiffness for a range of applications including their use as MEMS [5], [6], [19]- [27], single-/multi-axis precision positioning stages [19], [28]- [32], and macroscale bearings [8], [33]- [35].…”

Section: Introductionmentioning

confidence: 99%

Large displacement behavior of double parallelogram flexure mechanisms with underconstraint eliminators

Panas

2016

Precision Engineering

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This paper presents a new analytical method for predicting the large displacement behavior of flexural double parallelogram (DP) bearings with underconstraint eliminator (UE) linkages. This closed-form perturbative Euler analysis method is able to-for the first time-directly incorporate the elastomechanics of a discrete UE linkage, which is a hybrid flexure element that is linked to ground as well as both stages on the bearing. The models are used to understand a nested linkage UE design, however the method is extensible to other UE linkages. Design rules and figures-of-merit are extracted from the analysis models, which provide powerful tools for accelerating the design process. The models, rules and figures-of-merit enable the rapid design of a UE for a desired large displacement behavior, as well as providing a means for determining the limits of UE and DP structures. This will aid in the adoption of UE linkages into DP bearings for precision mechanisms. Models are generated for a nested linkage UE design, and the performance of this DP with UE structure is compared to a DP-only bearing. The perturbative Euler analysis is shown to match existing theories for DP-only bearings with distributed compliance within ≈2%, and Finite Element Analysis for the DP with UE bearings within an average 10%.

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Novel polysilicon comb actuators for xy-stages

Cited by 30 publications

References 7 publications

Novel method for mechanical characterization of polymeric nanofibers

Novel method for mechanical characterization of polymeric nanofibers

Optimization of Comb-Driven Devices for Mechanical Testing of Polymeric Nanofibers Subjected to Large Deformations

Large displacement behavior of double parallelogram flexure mechanisms with underconstraint eliminators

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