Novel 3D Piezoresistive Silicon Force Sensor for Dimensional Metrology of Micro Components

Ruther, Patrick; Bartholomeyczik, J.; Trautmann, Steffen; Wandt, M.; Oliver, Paul; Dominicus, W.; Roth, R.; Seitz, K.; Strauss, Walter A.

doi:10.1109/icsens.2005.1597872

Cited by 24 publications

(26 citation statements)

References 4 publications

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“…Silicon based piezoresistive sensors, as demonstrated in the literature [9,10,14,28,29,31], providing a compact system size and a minimal moving mass, perfectly fulfill these requirements. They comprise a central structure suspended within a solid frame.…”

Section: A 3d Force Sensor For Coordinate Measurement Machinesmentioning

confidence: 90%

“…This can only be achieved by ultra-high precision machines equipped with dedicated 3D scanning systems [27] and highly-sensitive tactile sensors minimizing measurement inaccuracies [10,[28][29][30]. In particular in case of the tactile sensor system, sensitivity as well as stiffness and thus the exerted contact forces have to be adjusted to match the small dimensions and fragility of the micromachined objects being characterized.…”

Section: A 3d Force Sensor For Coordinate Measurement Machinesmentioning

confidence: 99%

“…as finger print detectors [7,8], and process control [9,10]. Sensor specifications such as sensing principle, property to be determined, e.g.…”

Section: Introductionmentioning

confidence: 99%

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CMOS tactile sensor systems

et al. 2013

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Tactile sensor systems based on complementary metal-oxide-semiconductor (CMOS) technologies have found a wide variety of applications covering various types of manmachine interfaces as well as industrial applications. These sensor systems are realized using commercially available CMOS processes combined with appropriate assembly technologies for advanced system packages, and dedicated micromachining processes to realize membranes or beam structures to improve the sensor sensitivity. Piezoresistive CMOS-based tactile sensor systems make use of implanted resistors and field-effect transistors (FETs) exploiting the piezoresistive effect in silicon. The applied CMOS chips extract the mechanical stress distribution in the chip surface which is characteristic for the corresponding mechanical loading of the CMOS chip or its package. This paper describes a three-dimensional force sensor used in metrology to extract the 3D geometry of precision machined parts, and the Smart Tooth, an innovative tool for orthodontic research and education.

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Section: A 3d Force Sensor For Coordinate Measurement Machinesmentioning

confidence: 90%

Section: A 3d Force Sensor For Coordinate Measurement Machinesmentioning

confidence: 99%

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CMOS tactile sensor systems

et al. 2013

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“…This system has anisotropic stiffness, which in the vertical and lateral direction is 11 Nm -1 and -1 respectively [10]. Probing systems that use silicon structures similar to commercial pressure sensors have also been developed [11,12].…”

Section: Introductionmentioning

confidence: 99%

Variable stiffness probing systems for micro-coordinate measuring machines

Alblalaihid

Lawes

Kinnell

2016

Precision Engineering

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Abstract:Micro-scale probing systems are used on specialist micro-coordinate measuring machines to measure small, intricate and fragile components. Probe stiffness is a critical property of micro-scale probing systems; it influences contact force, robustness, ease of manufacture, accuracy and dynamic response. Selecting the optimum stiffness, therefore, represents a significant design challenge, and often leads to undesirable compromises. For example, when contacting fragile surfaces the probe stiffness should be low to prevent damage; however, for a more robust probing system the stiffness should be increased. This paper presents a novel concept for micro-scale probing systems with the ability to quickly and easily change and control probe stiffness during use. The intended strategy for using the proposed probe is first explained. Then the new concept is fully defined and explored through a combination of finite element analysis and experimental results. Two possible configurations of probe are described, and models for predicted performance for each are presented and compared. The models demonstrate significant stiffness reduction is possible with the proposed concept, and show it is theoretically possible to achieve a probing system with perfectly isotopic stiffness.

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“…But its application is restricted to specimen with low aspect ratio, i.e. free of features such as vertical sidewalls, undercuts and deep narrow drillings [7], [8]. Besides, the determination of three-component force vector is necessary for characterizing and quantifying surface roughness of complex specimen.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Liang

Zhang

et al. 2015

Measurement Science Review

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Roughness, which can represent the trade-off between manufacturing cost and performance of mechanical components, is a critical predictor of cracks, corrosion and fatigue damage. In order to measure polished or super-finished surfaces, a novel touch probe based on three-component force sensor for characterizing and quantifying surface roughness is proposed by using silicon micromachining technology. The sensor design is based on a cross-beam structure, which ensures that the system possesses high sensitivity and low coupling. The results show that the proposed sensor possesses high sensitivity, low coupling error, and temperature compensation function. The proposed system can be used to investigate micromechanical structures with nanometer accuracy.

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Novel 3D Piezoresistive Silicon Force Sensor for Dimensional Metrology of Micro Components

Cited by 24 publications

References 4 publications

CMOS tactile sensor systems

CMOS tactile sensor systems

Variable stiffness probing systems for micro-coordinate measuring machines

Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

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