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2015
DOI: 10.1515/msr-2015-0034
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Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Abstract: Roughness, which can represent the trade-off between manufacturing cost and performance of mechanical components, is a critical predictor of cracks, corrosion and fatigue damage. In order to measure polished or super-finished surfaces, a novel touch probe based on three-component force sensor for characterizing and quantifying surface roughness is proposed by using silicon micromachining technology. The sensor design is based on a cross-beam structure, which ensures that the system possesses high sensitivity a… Show more

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Cited by 6 publications
(3 citation statements)
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References 21 publications
(17 reference statements)
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“…The most well-known shape of the sensor's deformation part is the load cells [13] where the simplest shape is a flexible beam with which it is possible to design multicomponent force sensors [14]. In the design of a suitable flexible body of the sensor it was expected that the general shape of the load cell ( Fig.4.a) could be used.…”
Section: Sensor Of Physical Quantitymentioning
confidence: 99%
“…The most well-known shape of the sensor's deformation part is the load cells [13] where the simplest shape is a flexible beam with which it is possible to design multicomponent force sensors [14]. In the design of a suitable flexible body of the sensor it was expected that the general shape of the load cell ( Fig.4.a) could be used.…”
Section: Sensor Of Physical Quantitymentioning
confidence: 99%
“…Parallel mechanisms have been utilized in different fields such as conduct manufacturing machining [1]- [3], medical devices [4]- [7], sensor applications [8], etc., contributing to parallel mechanisms' parallel structure arrangement (i.e. high rigidity, high accuracy, high speed and acceleration, and no cumulative joint/link error).…”
Section: Introductionmentioning
confidence: 99%
“…Parallel robotic mechanisms have been broadly employed in the healthcare area [1], agricultural area [2,3], manufacturing area [4][5][6], sensor applications [7,8], etc. The Steward mechanism, one would say, is one of the most popular parallel robotic mechanisms.…”
Section: Introductionmentioning
confidence: 99%