Novel Method of Contactless Sensing of Mechanical Quantities

Abstract

This article addresses the method of sensing mechanical quantities, in particular force and pressure, without the electrical connection of the sensing element and the electronics. The information about the mechanical quantity is transmitted only by evaluating the changes in the electromagnetic field created around the sensor. The sensor is designed on the basis of a flexible micro-electro-mechanical element (MEMS), the resonance of which carries the information about the measured quantity.

Towards a MEMS Force Sensor via the Electromagnetic Principle

“…The design allows the creation of capacitor plates in the middle of the compliant body, while the threads of an inductor are embedded in the exterior portion of the compliant body, creating a parallel resonant circuit ( ) as can be seen in Figure 1 a. Different designs and materials were tested and are presented in [ 9 ]. The mechanical body was cut out of Teflon using a water jet, according to [ 10 ] with dimensions of mm.…”

“…The acting force is typically measured with an external driving antenna, and S-parameters are measured with a network analyzer. To avoid the need for such large and expensive laboratory equipment, we have tested and proven an evaluation method based on measuring the reflected wave from the radiator (the generator of the field), as shown in Figure 4 a [ 9 ]. The reflected wave was processed by a microcomputer board (instead of a network analyzer), and the overshoot in the voltage standing wave ratio ( ) was used to determine the resonant frequency of the transducer.…”

“…The previous study [ 9 ] explored the possibility of wireless transfer of information between the transducer (sensing element) (physical quantity -> electrical quantity) and the electronic part of the sensor. The transducer (composed of and an embedded ) is passive and does not require any galvanic connection to a power source or evaluating electronics.…”

Power and Force Limiting Technique at Collaborative Workplace

“…Therefore, various task assignments among operators and the robotic system can also be changing during operation. [Johannsmeier 2017] distributes assembly sub-tasks between a human and a collaborative robot to minimize workload or energy consumption per subtask. Proximity and common task between operator and robotic system have a substantial impact on the operator's safety.…”

“…The robotic system in such an application requires awareness and information about the environment and emotional situations that can be occurred in its workspace [Velisek 2017]. In addition, within the automation of technological processes (such as assembly) and miniaturization, each technical piece of equipment (as a robotic system) is considered one of the main issues in solving signal and energy transmission, also [Hartansky 2020]. This field of research is commonly known as human-robot collaboration ("HRC").…”