Nonlinear large deflection of nanopillars fabricated by focused ion-beam induced chemical vapor deposition using double-cantilever testing

Abstract

Mechanical characteristics and applications of diamondlike-carbon cantilevers fabricated by focused-ion-beam chemical vapor deposition Mechanical characteristics and its annealing effect of diamondlike-carbon nanosprings fabricated by focused-ionbeam chemical vapor deposition J. Vac. Sci. Technol. B 23, 2801 (2005); 10.1116/1.2132329Density estimation for amorphous carbon nanopillars grown by focused ion beam assisted chemical vapor deposition J.Nanopillars with nanosized diameter and microsized length can be constructed by chemical vapor deposition using a focused ion beam. For a pillar consisting of an outer amorphous carbon ring and an inner gallium core, we performed the bending tests using the unique double-cantilever specimen joining two pillars together by an electron-beam deposition technique in a scanning electron microscope. The precise load-deflection curves indicate that the pillars have a nonlinear softening region after the linear response as the diameter increases. However, pillars finally become extremely hardened at the large deformation. Thus, the pillar intrinsically possesses much more flexibility and stable deflection for bending than expected, in contrast to tensile deformation. The bending rigidity obtained by the infinitesimal deflection corresponds well to that by the resonance vibration tests reported so far. It also certifies that the proposed double-cantilever bending method can maintain high accuracy for the nanoscaled materials testing.

Novel nanoplasmonic biosensor integrated in a microfluidic channel

“…The vertical configuration of the pillars offers immediate advantages, such as high linearity in mechanical transduction response, large surface area and the possibility to have the surface layer separate from the underlying substrate. Fabrication of nanopillars has been achieved by using a variety of techniques, such as traditional lithography, reactive ion etching, electron beam lithography, chemical vapor deposition [5], [6] and template-assisted techniques [7], [8] . The most common materials used for these nanopillars include silicon, metals, metal oxide and ceramics, which have proved to be appropriate to fabricate structures with an aspect ratio greater than 10.…”

Bio-Applications of Nanopillars

“…The bottom-up approaches include chemical vapor deposition (CVD), [8] vapor-liquid-solid (VLS) growth, pulsed laser deposition, [9,10] template-assisted techniques, etc. [11][12][13][14].…”

Fabrication of CMOS-compatible nanopillars for smart bio-mimetic CMOS image sensors

“…Given this versatility of nanopillars, extensive research efforts have been put forward into their fabrication. Nanopillars have been synthesized using various methods such as using inductively coupled plasma cryogenic processes [6], deep reactive ion etching processes (DRIE) [7] with occasional aid from nanosphere lithography [8], focused ionbeam induced chemical vapor deposition [9], and electron beam lithography (EBL) [10].…”