Non‐optical tip–sample distance control method for scanning near‐field optical microscopy using a piezoresistive micro cantilever

Abstract

A piezoresistive micro cantilever is applied to monitor the displacement of an optical fibre probe and to control tip–sample distance. The piezoresistive cantilever was originally made for a self‐sensitive atomic force microscopy (AFM) probe and has dimensions of 400 µm length, 50 µm width and 5 µm thickness with a resistive strain sensor at the bottom of the cantilever. We attach the piezoresistive cantilever tip to the upper side of a vibrating bent optical fibre probe and monitor the resistance change amplitude of the strain sensor caused by the optical fibre displacement. By using this resistance change to control the tip–sample distance, the two‐cantilever system successfully provides topographic and near‐field optical images of standard samples in a scanning near‐field optical microscopy (SNOM)/AFM system. A resonant characteristic of the two‐cantilever system is also simulated using a mechanical model, and the results of simulation correspond to the experimental results of resonance characteristics.