“…2 Synthesis of good quality-defect free diamond films for potential optical and electronic applications is being pursued. 3 Furthermore, significant progress is being made in understanding the growth mechanism 4 - 6 and the formation of defectsr -8 such as twins, dislocations, stacking faults, second phase inclusions and interstitial hydrogen. Essentially single phase diamond films can be deposited from hydrocarbon-hydrogen mixtures over a narrow range of substrate temperatures 9 with significant co-deposition of amorphous carbon at lower temperatures, and formation of non-diamond components including micro-crystalline graphite at higher temperatures.1 0 The incorporation of defects in the diamond lattice is believed to originate from the differences in the relative rates of addition and incorporation of carbon atoms during film growth.…”