New insights into selected-area deposition of diamond films by means of selective seeding

Liu, Hongwu; Wang, Chengxin; Chen, Gao; Han, Yonghao; Luo, Jianlin; Zou, Guangtian; Chen, Wen

doi:10.1088/0953-8984/14/44/412

Cited by 8 publications

(8 citation statements)

References 9 publications

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“…The first relies on the seeding of a substrate on which the selective removal of the nanodiamond has been performed. 172 For instance, the patterning of the nanodiamonds can be achieved by a plasma etching of unwanted nanoparticles through the protection of an aluminum hard mask deposited by lithography. 173 Babchenko et al described a technique in which patterning of the seeds is obtained through the wet chemical removal of nanodiamonds with a SiO 2 layer on pre-defined areas by a buffer oxide etchant.…”

Section: Patternedmentioning

confidence: 99%

Diamond Nucleation and Seeding Techniques: Two Complementary Strategies for the Growth of Ultra-thin Diamond Films

Arnault

Girard

2014

Nanodiamond

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The controlled growth of ultra-thin diamond layers on a diversity of substrates is a major challenge for many technological applications (heat spreaders, electromechanical systems, etc.). This explains the huge effort produced during the last two decades to master the early stages of diamond formation. Two main pathways have been investigated in the literature. The nucleation pathway aims to produce diamond nuclei, i.e., the smallest thermodynamically stable diamond islands, at the substrate surface. This is mainly performed by in situ treatments preceding diamond chemical vapor deposition (CVD) growth, such as bias enhanced nucleation (BEN). The second approach consists of skipping the nucleation stage by covering, ex situ, the substrate with diamond nanoparticles, which act as seeds for diamond CVD growth. The present chapter is a review of these pathways. Their respective benefits and drawbacks are discussed. Finally, these two approaches appear very complementary. Seeding allows the growth of ultra-thin diamond layers on large non-conductive substrates with micrometric patterns. On the other hand, the BEN in situ nucleation treatment remains the favored technique to achieve well-adherent diamond films and diamond heteroepitaxy.

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Section: Patternedmentioning

confidence: 99%

Diamond Nucleation and Seeding Techniques: Two Complementary Strategies for the Growth of Ultra-thin Diamond Films

Arnault

Girard

2014

Nanodiamond

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“…The SAD growth of diamond structures has been achieved using several treatment techniques such as the removal of the diamond nuclei (seeds) from defi ned areas (Hirabayashi et al , 1988;Liu et al , 2002), bias enhanced diamond nucleation process on pre-defi ned areas Sakamoto et al , 1998), the direct 'printing' of diamond seeds onto the selected area by ink-jet printing (Fox et al , 2000) or wet chemical etching of SiO 2 on selected areas by buffer oxide etchant (Kromka et al , 2009d). Common limitations of the above mentioned treatments are either aggressive wet chemistries or the need for a specifi c type of substrate material.…”

Section: Polymer/ultra-dispersed Diamond (Udd) Heterostructuresmentioning

confidence: 99%

Diamond nucleation and seeding techniques for tissue regeneration

Kromka

Babchenko

Potocký

et al. 2013

Diamond-Based Materials for Biomedical Applications

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“…1−3 At the same time, diamond is used in numerous industrial fields. As a consequence, various diamond structuring strategies have been developed to fit specific requirements, 4−6 e.g., large surface areas, geometrically ordered microstripes or meshes, 7 nano-objects or nanostructures (wires, rods, and whiskers), 8,9 porous films and membranes, 10,11 etc.…”

Section: Introductionmentioning

confidence: 99%

Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement

et al. 2019

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Synthetic diamond films are routinely grown using chemical vapor deposition (CVD) techniques. Due to their extraordinary combination of intrinsic properties, they are used as the functional layers in various bio-optoelectronic devices. It is a challenge to grow the dimensional layers or porous structures that are required. This study reviews the fabrication of various porous diamond-based structures using linear antenna microwave plasma (LAMWP) chemical vapor deposition (CVD), a low-cost technology for growing diamond films over a large area (>1 m 2 ) at low pressure (<100 Pa) and at low temperature (even at 350 °C). From a technological point of view, two different approaches, i.e., templated diamond growth using three different prestructured (macro-, micro-, and nanosized) porous substrates and direct bottom-up growth of ultra-nanoporous diamond (block-stone and dendritelike) films, are successfully employed to form diamond-based structures with controlled porosity and an enhanced surface area. As a bottom-up strategy, the LAMWP CVD system allows diamond growth at as high as 80% CO 2 in the CH 4 /CO 2 /H 2 gas mixture. In summary, the low-pressure and cold plasma conditions in the LAMWP system facilitate the growth on three-dimensionally prestructured substrates of various materials that naturally form porous self-standing diamond structures.

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New insights into selected-area deposition of diamond films by means of selective seeding

Cited by 8 publications

References 9 publications

Diamond Nucleation and Seeding Techniques: Two Complementary Strategies for the Growth of Ultra-thin Diamond Films

Diamond Nucleation and Seeding Techniques: Two Complementary Strategies for the Growth of Ultra-thin Diamond Films

Diamond nucleation and seeding techniques for tissue regeneration

Great Variety of Man-Made Porous Diamond Structures: Pulsed Microwave Cold Plasma System with a Linear Antenna Arrangement

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