2018
DOI: 10.1016/j.mee.2018.09.003
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New design of the cantilevers for radiation pressure investigations

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Cited by 9 publications
(6 citation statements)
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“…A new kind of microcantilever was presented in our previous work 5 . Its construction was optimized to provide greater force sensitivity to measure forces as small as surface adhesion or radiation pressure.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…A new kind of microcantilever was presented in our previous work 5 . Its construction was optimized to provide greater force sensitivity to measure forces as small as surface adhesion or radiation pressure.…”
Section: Methodsmentioning
confidence: 99%
“…For this purpose, precise microelectromechanical systems (MEMS) are being constructed 1 employing a series of techniques for deflection actuation and deflection detection 2 , 3 . With the use of nanometrological devices, it is possible to measure distances down to femtometers 4 and forces down to femtonewtons 5 , 6 —the order of magnitude at which photon force (PF) is measurable.…”
Section: Introductionmentioning
confidence: 99%
“…In our experiment we used a PF-MEMS cantilever [26], which was a U-shaped, 500 µm long, 130 µm wide and 1.5 µm thick structure with a stiffness of about 100 mN m −1 [17]. The cantilever was manufactured using silicon-on-insulator technology.…”
Section: The Microcantilever As a Measurement Toolmentioning
confidence: 99%
“…In many experiments, the mechanical response of a micromechanical device is analysed using a bulk optics setup [17]. It is difficult to carry out precise adjustments and the size of the whole device is another weakness of such a solution.…”
Section: Introductionmentioning
confidence: 99%
“…Active electromagnetic cantilevers, which were U-shaped conductive cantilevers fabricated using the technology presented in [14], were subjected to a magnetic field and driven by a Howland current source (HCS) (figure 1). The general formula for the electromagnetic force induced by the bias current in the magnetic field is given by:…”
Section: Electromagnetic Actuationmentioning
confidence: 99%