Necrofabricated plastic 95-ghz rectangular waveguide

Sammoura, Firas; Su, Yu-Chuan; Cai, Ying; Chi, Chen; Elamaran, B.; Lin, Liwei; Chiao, Jung-Chih

doi:10.1109/memsys.2005.1453893

Cited by 10 publications

(6 citation statements)

References 7 publications

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“…Therefore, the tuning range is 2.76% of the center frequency and Table II summarizes the tunable filter performance. [11]. and +150gm membrane deflection, respectively.…”

Section: Tunable Iris Filter Simulation Using Hfssmentioning

confidence: 91%

“…Table 1 summarizes the simulation results of various parameters when the membrane deflects from -150 to 150gm and a total center frequency shift of 4GHz is predicted, with no additional insertion loss and minimal bandwidth distortion. The fabrication process follows our previous work [11] as illustrated in Fig. 4.…”

Section: Tunable Iris Filter Simulation Using Hfssmentioning

confidence: 99%

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A Plastic W-Band MEMS Tunable Filter

Sammoura

Lin

2006

2006 IEEE MTT-S International Microwave Symposium Digest

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A plastic, W-band MEMS tunable filter has been successfully demonstrated by built-in deformable membranes. The filter has been fabricated using a MEMS-based process with plastic micro embossing process and gold electroplating. Two movable membranes of 1.6mm in diameter are designed as part of a two-cavity iris filter to actively change the cavity geometry for frequency turning. Prototype filter has been fabricated and measured with bandwidth of 4.05GHz centered at 94.79GHz with a minimum insertion loss of 2.37dB and return loss better than 15dB. A total of 2.59GHz center frequency shift has been achieved when membranes deflect from -50gm to +150gm.

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“…Therefore, the tuning range is 2.76% of the center frequency and Table II summarizes the tunable filter performance. [11]. and +150gm membrane deflection, respectively.…”

Section: Tunable Iris Filter Simulation Using Hfssmentioning

confidence: 91%

Section: Tunable Iris Filter Simulation Using Hfssmentioning

confidence: 99%

A Plastic W-Band MEMS Tunable Filter

Sammoura

Lin

2006

2006 IEEE MTT-S International Microwave Symposium Digest

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“…3-D structures are fabricated by industrial plastic molding and electroplating processes with integrated active/passive components and fluidic control for reconfigurable beam-formers. Several microwave components have been developed including waveguides [ 36 ], iris filters [37], horn antennas and tunable filters [ 38 ]. This molding-based architecture enables low-cost manufacturing and integration of 3-D micro electromagneticwave components, with capability to integrate monolithic IC components to achieve low-cost and reconfigurable micro beam-formers.…”

Section: Extravehicular Sensorsmentioning

confidence: 99%

Micro- and Nano-Technologies for Automotive Sensor Research

Walther¹,

Lin²,

Pisano³

2007

SAE Technical Paper Series

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Current and future research directions for micro-and nano-technologies applicable to the automotive sensor market are presented. Micro-and nano-based sensors are inherently small with high bandwidth and incredible sensitivity potential and can therefore used to measure the desired data directly (eg. force from road on wheel at wheel bearing) rather than inferring data by indirect measurement and data table lookup. The key to leveraging the capabilities of micro-and nano-systems is to control the interface between the microsystem and vehicle component, and/or the nanoscale device and the microscale packaging. The former interface is primarily responsible for device performance and the latter for processing and integration cost. To demonstrate these points, a number of micro-and nano-sensors, currently in development, are described and reviewed. To examine the influence of the interface between micro-and macroscale systems, a high sensitivity and bandwidth resonant strain sensor mounted to steel components is examined. To exemplify the interface between microscale physical (e.g. temperature, acceleration, pressure, strain) and chemical sensors (e.g. oxygen and hydrogen) and their environment are examined. Lastly, nanowire and nanotube sensors fabricated using a new, room temperature fabrication method that leverages microscale devices and enables the nanowires and nanotubes to be fabricated directly on CMOS chips will be discussed. These sensors, and others, promise to revolutionize the automotive sensor market and will make possible a new generation of extremely safe, high performance automobile systems.

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“…In various applications, the processes would need some minor changes. Figure 2 shows the fabricated waveguide [10]. The scanning electron microscope (SEM) photo shows the result of the selective electroplating process [11] that metallically bonds and seals the waveguide walls.…”

Section: Design and Fabrication Processmentioning

confidence: 99%

Micro hot embossed plastic millimeter-wave systems

Cai

Sammoura

et al. 2005

Microelectronics: Design, Technology, and Packaging II

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Recently, millimeter-wave devices have been attracted more attentions in applications owing to their short wavelengths, higher resolutions, broader bandwidths and higher environmental tolerance. The great challenges of high fabrication and assembly costs, bulky volumes, and heavy weights of millimeter-wave systems call for new integrated manufacturing techniques. The hot embossing technique could address these challenges. In this paper, a review of micro plastic hot embossing was given for the fabrication of miniaturized millimeter-wave systems. The micro hot embossing on plastic materials demonstrated its advantages on significant costs, volume and weight reduction, while maintaining high performances.We have designed, fabricated and characterized a W-band rectangular waveguide and a W-band iris waveguide filter with integrated plastic flanges using micro hot embossing and selective electroplating. In this paper, we reviewed the results and discussed the design methodology in details for the micromachined components. The prototype devices showed promise for the system designs.

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Necrofabricated plastic 95-ghz rectangular waveguide

Cited by 10 publications

References 7 publications

A Plastic W-Band MEMS Tunable Filter

A Plastic W-Band MEMS Tunable Filter

Micro- and Nano-Technologies for Automotive Sensor Research

Micro hot embossed plastic millimeter-wave systems

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