A Plastic W-Band MEMS Tunable Filter

Sammoura, Firas; Lin, Liwei

doi:10.1109/mwsym.2006.249413

Cited by 9 publications

(2 citation statements)

References 11 publications

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“…3-D structures are fabricated by industrial plastic molding and electroplating processes with integrated active/passive components and fluidic control for reconfigurable beam-formers. Several microwave components have been developed including waveguides [ 36 ], iris filters [37], horn antennas and tunable filters [ 38 ]. This molding-based architecture enables low-cost manufacturing and integration of 3-D micro electromagneticwave components, with capability to integrate monolithic IC components to achieve low-cost and reconfigurable micro beam-formers.…”

Section: Extravehicular Sensorsmentioning

confidence: 99%

Micro- and Nano-Technologies for Automotive Sensor Research

Walther¹,

Lin²,

Pisano³

2007

SAE Technical Paper Series

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Current and future research directions for micro-and nano-technologies applicable to the automotive sensor market are presented. Micro-and nano-based sensors are inherently small with high bandwidth and incredible sensitivity potential and can therefore used to measure the desired data directly (eg. force from road on wheel at wheel bearing) rather than inferring data by indirect measurement and data table lookup. The key to leveraging the capabilities of micro-and nano-systems is to control the interface between the microsystem and vehicle component, and/or the nanoscale device and the microscale packaging. The former interface is primarily responsible for device performance and the latter for processing and integration cost. To demonstrate these points, a number of micro-and nano-sensors, currently in development, are described and reviewed. To examine the influence of the interface between micro-and macroscale systems, a high sensitivity and bandwidth resonant strain sensor mounted to steel components is examined. To exemplify the interface between microscale physical (e.g. temperature, acceleration, pressure, strain) and chemical sensors (e.g. oxygen and hydrogen) and their environment are examined. Lastly, nanowire and nanotube sensors fabricated using a new, room temperature fabrication method that leverages microscale devices and enables the nanowires and nanotubes to be fabricated directly on CMOS chips will be discussed. These sensors, and others, promise to revolutionize the automotive sensor market and will make possible a new generation of extremely safe, high performance automobile systems.

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Section: Extravehicular Sensorsmentioning

confidence: 99%

Micro- and Nano-Technologies for Automotive Sensor Research

Walther¹,

Lin²,

Pisano³

2007

SAE Technical Paper Series

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“…However, their resonators exhibit small Q-factor [4][5][6] and are very sensitive to temperature variations [7]. MEMS-based filter designs provide low loss and good linearity [8]. However, MEMS-based tuning elements show limited actuation speed of as much as few microseconds.…”

Section: Introductionmentioning

confidence: 99%

Low-loss and tunable millimeter-wave filters using spherical dielectric resonators

Dey¹,

Marin²,

Hesselbarth³

2020

Int. J. Microw. Wireless Technol.

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Millimeter-wave band-pass filters using spherical dielectric resonators are presented. The dielectric spheres are sandwiched between metal plates and are excited by a simple microstrip line structure on a thin-film circuit board. As such, these filters could also be implemented in the back-end-of-line layers of an integrated circuit. A single resonator, based on a diameter 0.6 mm alumina ceramic sphere, is shown to resonate with high unloaded Q-factor of 750 at 170 GHz. A three-sphere band-pass filter is measured showing <5 dB insertion loss and 0.4% bandwidth at 170 GHz. A concept for mechanically tuning of a two-sphere band-pass filter is demonstrated for a filter operating around 105 GHz. The measured filter shows approximately 5 dB insertion loss and <0.5% bandwidth and its passband can be varied over 3 GHz of frequency, or 3%. Technological challenges are discussed.

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