Nanosphere Lithography

Waegner, Martin

doi:10.1007/978-3-642-28522-6_12

Cited by 4 publications

(1 citation statement)

References 27 publications

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“…Nanosphere lithography (NSL) [31][32][33][34][35][36] is a popular fabrication technique which depends on the self-assembly of nanoscale features to attain the periodic nanostructures. This technique has been studied extensively since the last decade due to certain advantages like simplicity of the process, cost, and time effectiveness, and easily industrializable.…”

Section: Introductionmentioning

confidence: 99%

Controlling Vertical Asymmetry of Nanocrystals Through Anisotropic Etching‐Assisted Nanosphere Lithography

Ganguly,

Zafar,

Howells

et al. 2023

Small Structures

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Nanosphere lithography, a low‐cost fabrication technique, depends on the self‐assembly of nanoscale features to create nanostructures in a hexagonally close‐packed structure. In this article, the fabrication of 3D nanostructures over a large surface‐area with anisotropy along the growth direction through the combination of chemical and physical plasma etching is reported. The anisotropy stems from etching the nanosphere mask and the substrate at different rates. Due to the dynamic masking effect, a systematic variation of etching time gives rise to intriguing nanostructures with sharp edges that have strong potential for plasmonic applications, with the possibility of manipulating electromagnetic radiation. The structures obtained include nanocylinders, truncated hexagon‐based pyramids, circular pads on a conical base, and nanocones from a single‐layer nanosphere mask. Simulations of the fabrication process offer further insight into the understanding of nanostructure formation. A good agreement between predicted results and experiments confirms the potential of our numerical design. In addition, the optical properties of the nanostructures are investigated by UV–vis and the experimental findings are consistent with simulations based on a finite‐difference time‐domain method. The nanostructures described in this study contribute to the emerging 3D plasmonics and 3D magnonics, with strong potential for a significant impact on biosensor applications.

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Section: Introductionmentioning

confidence: 99%

Controlling Vertical Asymmetry of Nanocrystals Through Anisotropic Etching‐Assisted Nanosphere Lithography

Ganguly,

Zafar,

Howells

et al. 2023

Small Structures

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Novel Nanofabricated Mo Field-Emitter Array for Low-Cost and Large-Area Application

Yan

Pang

et al. 2018

IEEE Trans. Electron Devices

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Connected Lead Zirconate Titanate Nanodot Arrays for Perspective Functional Materials

Waegner

Finn

Suchaneck

et al. 2013

Journal of Nanoscience

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We describe the fabrication of lead zirconate titanate (PZT) nanodisc arrays isolated by a polymer layer and contacted with a top electrode. PZT thin films were deposited by multitarget sputtering onto a platinum/titanium bottom electrode and structured by means of nanosphere lithography. To guarantee short-circuit-free deposition of a top electrode, the space between the nanostructures was filled by a polymer. Two approaches for the filling are demonstrated: (a) imprinting and (b) skim coating. Single nanodiscs embedded in a flexible polymer matrix have two major advantages. First, taking into account the flexibility of the matrix, they can vibrate in lateral direction and, second, due to shrinking to the nanoscale, predominant directions of the polarization form, such as vortex- or bubble-like domain patterns. Piezoresponse force microscopy was performed on patterned and nonpatterned samples with and without a top electrode to check the local piezoresponse. Comparison of the different samples revealed an increase in lateral piezoactivity for patterned samples with Ni/Cr electrode while the out-of-plane piezoresponse remained constant. Gold electrodes limit the piezoresponse in both measured directions.

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Nanosphere Lithography

Cited by 4 publications

References 27 publications

Controlling Vertical Asymmetry of Nanocrystals Through Anisotropic Etching‐Assisted Nanosphere Lithography

Controlling Vertical Asymmetry of Nanocrystals Through Anisotropic Etching‐Assisted Nanosphere Lithography

Novel Nanofabricated Mo Field-Emitter Array for Low-Cost and Large-Area Application

Connected Lead Zirconate Titanate Nanodot Arrays for Perspective Functional Materials

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