Controlling Vertical Asymmetry of Nanocrystals Through Anisotropic Etching‐Assisted Nanosphere Lithography
Arnab Ganguly,
Humaira Zafar,
Calvyn Travis Howells
et al.
Abstract:Nanosphere lithography, a low‐cost fabrication technique, depends on the self‐assembly of nanoscale features to create nanostructures in a hexagonally close‐packed structure. In this article, the fabrication of 3D nanostructures over a large surface‐area with anisotropy along the growth direction through the combination of chemical and physical plasma etching is reported. The anisotropy stems from etching the nanosphere mask and the substrate at different rates. Due to the dynamic masking effect, a systematic … Show more
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