Nanosized Diamond Deposition via Plasma Medium

On the Plasma Chemistry of CH4H2Ar System Relevant to Diamond Deposition Process by Plasma Enhanced Chemical Vapor Deposition

“…However, etching phenomenon describes the detachment of atoms, molecules or radicals from surface by means of H or H + . Etching phenomenon removes the undesired species or detaches the molecules that are not grown in the favorable direction during the deposition stage 11, 23. Therefore, in order to study the growth process, we need to emphasize on the physics behind the different deposition and etching phenomena.…”

“…Neutrals surface reaction processes attribute to activation/deactivation, growth and gasification of surface sites, and inter‐conversion of surface morphology. The growth of diamond film is mainly interrelated to collisions of methyl radicals (CH 3 ) and acetylene (C 2 H 2 ) with surface 11. Elsewhere, the activation, deactivation, growth, and gasification of SP 2 sites, and the inter‐conversion between SP 2 and SP 3 phases determine the final crystallography and orientation of deposited diamond 2.…”

“…Experimentally, it was observed that in CVD gas phase diamond deposition, H reacts with the adsorbed species on the growing film and forms some gas phase products, which are transferred back into gas phase 11, 22–23. Such reactions in the CVD process lead to the detachment of undesired molecules and radicals known by etching phenomenon 2, 23.…”

“…Ar also increases the growth rate and modifies the surface morphology of the film 9. H 2 gas is used as a source of H and H + 10–11. H 2 , H, and H + play an essential role in the destruction of polymeric carbon chain in surface etching of undesired species from surface, and help the production of activated radicals and ions by reacting with CH 4 and other hydrocarbons 10–11.…”

“…H 2 gas is used as a source of H and H + 10–11. H 2 , H, and H + play an essential role in the destruction of polymeric carbon chain in surface etching of undesired species from surface, and help the production of activated radicals and ions by reacting with CH 4 and other hydrocarbons 10–11. The effect of the non‐neutral species involved in PECVD of diamond has been examined experimentally in Ref 12.…”