Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology

Abstract

High-precision metrology has emerged as an enabling technology for modern key technologies. Therefore, at the Technische Universität Ilmenau, a new nanopositioning and nanomeasuring machine NPMM-200 with a measuring range of 200 mm × 200 mm × 25 mm, and a resolution of 0.02 nm was developed. The machine represents the great improvement of the extended threedimensional Abbe comparator principle to achieve nanometre accuracy. All six degrees of freedom of the mirror plate with the measuring object are measured by fibre-coupled laser interferometers, the signals of which are then used together with the probe system signals for a high-precision position and orientation control and surface and coordinate measurements. This paper presents the metrological concept, the realized design as well as the metrological parameters.

Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level

“… ITO—Nanopositioning and Nanomeasuring Machine NPMM-200 is equipped with optical focus sensor fixed on a metrological frame made of Zerodur ® that holds a number of fiber-coupled laser interferometers to track the relative position of the sample holder ( Figure 9 c). The single point sensor was used in a null mode; meaning that the machine controlled the z-position of the sample holder such that the sample surface was kept in focus [ 43 ]. …”

Anwendungen eines fasergekoppelten chromatisch konfokalen Sensors in Nanopositionier- und Nanomessmaschinen / Applications of a fiber coupled chromatic confocal sensor in nanopositioning and nanomeasuring machines

“…Diese Maschinen zeichnen sich durch ihre großen Arbeitsvolumina von 25 × 25 × 5 mm 3 der kleinen (NMM-1) bzw. 200 × 200 × 5 mm 3 der großen Maschinenversionen (NPMM-200) aus [5,7].…”

Nanomanufacturing—Perspective and applications

“…The nanopositioning and nanomeasuring machine NPMM-200 can reach a measurement range of 200 mm  200 mm  25 mm with a resolution of 20 pm [104]. This provides the SPM a potential for the dimensional measurement of nano-and microstructures over a large area.…”