Abstract:Negative-ion implantation could be used to create nanoparticles in oxide insulators with finely controlled accuracy for both depth and size. For 50-nm-thick SiO 2 film on Si, Ag nanoparticles with 3 nm in diameter were created in the center of the film with distribution thickness of 17 nm. Cu negative-ion implanted silica glass and soda-lime glass showed a high nonlinear susceptance of the 3 rd order in nonlinear optical property. Cu and Ag double-implanted silica glass showed an absorption peak between two ab… Show more
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