Sequential
infiltration synthesis (SIS), when combined with novel
polymeric materials capable of self-assembly, such as block copolymers
(BCPs), has been shown to effectively improve the pattern transfer
of nanoscale templates. Herein, we present a study of the SIS process
aimed at elucidating some critical aspects such as the evolution of
the BCP morphology and mechanical properties after infiltration. Atomic
force microscopy nanomechanical mapping was able to measure a consistent
stiffness change within the SIS-infiltrated poly(methyl methacrylate)
(PMMA) blocks. Interestingly, the increase in Young’s modulus
of the infiltrated blocks is small compared to the final stiffening
of the same infiltrated features after a treatment with oxygen plasma.