Nanomaterials Enter the Silicon-Based CMOS Era: Nanorobotic Technologies for Nanoelectronic Devices

Fatikow, Sergej; Eichhorn, Volkmar; Bartenwerfer, Malte

doi:10.1109/mnano.2011.2181735

Cited by 13 publications

(6 citation statements)

References 14 publications

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“…Over the past decades, nanomaterials have gained a lot of attention. Numerous nanomaterials have been exploited in many fields, including electron devices [16], health care [17], energy [18], etc. The past decades have also witnessed the increasing applications of nanomaterials in the environmental protection field [19].…”

Section: Introductionmentioning

confidence: 99%

Nanomaterials for the Removal of Heavy Metals from Wastewater

et al. 2019

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Removal of contaminants in wastewater, such as heavy metals, has become a severe problem in the world. Numerous technologies have been developed to deal with this problem. As an emerging technology, nanotechnology has been gaining increasing interest and many nanomaterials have been developed to remove heavy metals from polluted water, due to their excellent features resulting from the nanometer effect. In this work, novel nanomaterials, including carbon-based nanomaterials, zero-valent metal, metal-oxide based nanomaterials, and nanocomposites, and their applications for the removal of heavy metal ions from wastewater were systematically reviewed. Their efficiency, limitations, and advantages were compared and discussed. Furthermore, the promising perspective of nanomaterials in environmental applications was also discussed and potential directions for future work were suggested.

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Section: Introductionmentioning

confidence: 99%

Nanomaterials for the Removal of Heavy Metals from Wastewater

et al. 2019

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“…AFM probes and tungsten needles are the most popular end-effectors for nanomanipulation owing to their versatility and commercial availability. A nanomanipulator that is equipped with an AFM probe can perform topography imaging, indentation, stretching, cutting and pushing, pick-and-place operation and assembly, and nanolithography 2,8,40,70 . The AFM cantilever structure can be modified by FIB etching and deposition to create various types of application-specific tools.…”

Section: Sensingmentioning

confidence: 99%

“…FIB has also been integrated for material etching and deposition. Several hybrid AFM/SEM and AFM/FIB/SEM systems have been developed 28,40,43,146,147 , and commercial systems have also become available (for example, Semilab, Attocube, Trioptics, Nanonics Imaging Ltd, Kleindiek Nanotechnik).…”

Section: Hybrid System Integration Inside Semsmentioning

confidence: 99%

“…This hybrid instrument enables imaging with a large field of view from an SEM, three-dimensional (3D) material and end tool modifications with FIB, and high-resolution AFM imaging. Figure 3f shows another hybrid AFM/FIB/SEM system that uses piezoresistive cantilevers in contact mode AFM imaging and manipulation with SEM imaging and FIB etching/deposition 40 . STM/SEM integrated systems have also been developed for simultaneous imaging, manipulation, and measurements 149,150 .…”

Section: Hybrid System Integration Inside Semsmentioning

confidence: 99%

“…State-of-the-art SEM-based nanomanipulation systems are also integrated with AFMs and focused ion beam (FIB) systems, as well as various tools 38 and exchangeable toolboxes 39 . With these advances, powerful nano-laboratories have been established that are capable of simultaneous imaging, fabrication, and nanomanipulation [40][41][42][43] with high efficiency and reproducibility via the use of emerging automation techniques 30,[44][45][46] .…”

Section: Introductionmentioning

confidence: 99%

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Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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