Nanoimprint lithography fabrication of waveguide-integrated optical gratings with inexpensive stamps

Grego, Sonia; Huffman, Alan; Lueck, Matthew; Stoner, Brian R.; Lannon, John

doi:10.1016/j.mee.2009.11.003

Cited by 17 publications

(10 citation statements)

References 10 publications

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“…The new configuration is more efficient and compatible with evanescent wave sensing devices. [6][7][8]12,28 We report the characterization of this particle/cell collection device with regard to chamber height, applied potentials, frequency, electrode geometry, electrode and gap width, repetition of asymmetric electrode patterns, and electrolyte concentration. We also introduce techniques combining ACEO with DEP to improve the performance of the device for collecting particles and cells from suspension.…”

Section: Introductionmentioning

confidence: 99%

On-chip collection of particles and cells by AC electroosmotic pumping and dielectrophoresis using asymmetric microelectrodes

Melvin¹,

Moore²,

Gilchrist³

et al. 2011

Biomicrofluidics

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The recent development of microfluidic "lab on a chip" devices requiring sample sizes <100 lL has given rise to the need to concentrate dilute samples and trap analytes, especially for surface-based detection techniques. We demonstrate a particle collection device capable of concentrating micron-sized particles in a predetermined area by combining AC electroosmosis (ACEO) and dielectrophoresis (DEP). The planar asymmetric electrode pattern uses ACEO pumping to induce equal, quadrilateral flow directed towards a stagnant region in the center of the device. A number of system parameters affecting particle collection efficiency were investigated including electrode and gap width, chamber height, applied potential and frequency, and number of repeating electrode pairs and electrode geometry. The robustness of the on-chip collection design was evaluated against varying electrolyte concentrations, particle types, and particle sizes. These devices are amenable to integration with a variety of detection techniques such as optical evanescent waveguide sensing.

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Section: Introductionmentioning

confidence: 99%

On-chip collection of particles and cells by AC electroosmotic pumping and dielectrophoresis using asymmetric microelectrodes

Melvin¹,

Moore²,

Gilchrist³

et al. 2011

Biomicrofluidics

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“…Grating-integrated optical waveguide devices were fabricated as described previously [3,5]. Briefly, the silicon oxynitride films were deposited in a capacitively coupled PECVD system (Oxford Plasmalab80 ® Plus) at rf frequencies of 100 kHz.…”

Section: Grating-integrated Waveguide Fabricationmentioning

confidence: 99%

“…A grating pattern was integrated with the slab waveguide using thermal nanoimprint lithography with a commercial replica grating as a template followed by dry etching. Details of the processing steps are reported in [5]. Holographic grating masters (3-4067, Optometrics) with grooves on a Λ=1μm pitch were used as masters.…”

Section: Grating-integrated Waveguide Fabricationmentioning

confidence: 99%

Tunable wavelength interrogated sensor platform (TWIST) for point-of-care diagnostics of infectious diseases

2011

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The TWIST platform is an optical evanescent wave sensor which enables a label-free immunoassay-based portable instrument. The approach is based on input grating coupler sensors serving as functionalized sensing devices. Binding of the target analyte to the receptor-coated grating is detected by wavelength interrogation in the telecom spectral range. We have demonstrated that high performance volumetric sensing can be achieved using a compact, low-cost telecom laser as light source. The system footprint including light source, detectors and digitizers is compact. The platform is amenable to multiplexed operation. We demonstrated a two-output system which enables detection of an analyte with an on-chip reference signal.

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“…1,2 Compared with the conventional photolithography and other NGL techniques, such as the extreme ultraviolet, electron-beam, ion-beam, and X-ray lithography, NIL has a unique competitive advantage and extensive application prospects in the fabrication of micro/nano structures. [3][4][5][6][7] The key difference between them is that NIL is a contact patterning process based on the deformation of polymer materials and can reach a very high resolution that is not limited by the light diffraction or scattering. 8 Parallel surface contact between the template with predefined micro/nano patterns and the substrate that accepts the patterns is very critical for pattern fidelity in NIL, whereas the nonparallel surface contact will lead to the uneven patterns on the substrate.…”

Section: Introductionmentioning

confidence: 99%

A force-decoupled compound parallel alignment stage for nanoimprint lithography

Sun

Chen

Zhou

et al. 2013

Review of Scientific Instruments

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This paper presents the development of a force-decoupled compound parallel alignment stage for nanoimprint lithography. Parallel alignment stage is a critical component of nanoimprint machine to implement the uniform surface contact between the template with predefined micro/nano patterns and the substrate that accepts the patterns. A combination of a high-stiffness spherical air bearing and a multi degree-of-freedom flexure-based mechanism is adopted in the parallel alignment stage. Apart from the parallel alignment function, the proposed stage can also endure a large imprinting force (more than 1000 N) but does not cause any damage to the delicate flexure-based mechanism. The stage performance is evaluated to satisfy the alignment requirement through the theoretical modeling and finite element analysis. Experiments are conducted on the parallel alignment stage to verify its performance on the transferred grating patterns with linewidth of 2.5 μm. This result demonstrates that the proposed approach can enhance the load capacity of the parallel alignment stage without degrading its alignment accuracy for nanoimprint lithography.

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Nanoimprint lithography fabrication of waveguide-integrated optical gratings with inexpensive stamps

Cited by 17 publications

References 10 publications

On-chip collection of particles and cells by AC electroosmotic pumping and dielectrophoresis using asymmetric microelectrodes

On-chip collection of particles and cells by AC electroosmotic pumping and dielectrophoresis using asymmetric microelectrodes

Tunable wavelength interrogated sensor platform (TWIST) for point-of-care diagnostics of infectious diseases

A force-decoupled compound parallel alignment stage for nanoimprint lithography

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