Nanoelectromechanical systems: A new opportunity for microelectronics

Abstract

Transitioning nanoscale devices from the realm of one-of-a-kind feats into robust and reproducible nanosystems-that is, useable technology-is a monumental challenge that transcends the capabilities of any one laboratory. Some solid progress is now being achieved toward this end, and these efforts are critical for realizing the promise of "active" nanotechnology. At least two essential elements must be in place to realize the vast applications potential that awaits. First, an unfamiliar fusion of technologies is required; one that melds

Investigation of contact resistance evolution of Ir, Pt, W, Ni, Cr, Ti, Cu and Al over repeated hot-contact switching for NEMS switches

“…It is known that hot-cycling MEMS switches deteriorates the contact area as a function of time due to a multitude of phenomena including surface pitting, fatigue, asperity generation, charge migration, stiction and micro-welding and other physical damages. Despite numerous reports of 10 8 -10 10 successful switching cycles in literature [1][2][3][4][5][6][7][8] and the large research interest [9][10][11][12][13][14], knowledge on understanding this phenomena affecting repeated cycling still remains unclear. The question remains: "What really governs the "perfectly reliable" MEMS/NEMS switch?…”

Design of MEMS based XOR and AND gates for rad-hard and very low power LSI mechanical processors

“…NEMS switches have found interesting wide gamut of areas ranging from pr management in scaled VLSI, programming FPGA's to biomedical devices prolonging life and other applications in harsh env CMOS based devices cannot operate [1][2][3][4][5][6][7][8][9][10] includes that in the presence of ionizing r troubled reactors like Chernobyl and Fuk temperatures. The need for specialized ele cases is paramount as in typical cases the s CMOS becomes highly conductive due generation caused by I-R radiation over pro [4].…”