Nanocolumnar Preferentially Oriented PSZT Thin Films Deposited on Thermally Grown Silicon Dioxide

Abstract

We report the first instance of deposition of preferentially oriented, nanocrystalline, and nanocolumnar strontium-doped lead zirconate titanate (PSZT) ferroelectric thin films directly on thermal silicon dioxide. No intermediate seed or activation layers were used between PSZT and silicon dioxide. The deposited thin films have been characterised using a combination of diffraction and microscopy techniques.

Surface Morphology Induced Localized Electric Field and Piezoresponse Enhancement in Nanostructured Thin Films

“…In order to maximize this piezoelectric response (henceforth referred to as piezoresponse), and the related piezoelectric charge coefficient d 33 , preferential crystalline orientation is desired. , Piezoelectric materials with a tetragonal or rhombohedral unit cell tend to have high response, − and films oriented with their longer unit cell axis (the c -axis) perpendicular to the substrate are especially desirable to achieve enhanced performance (enabling greater polarization and strain). In the case of polycrystalline thin films, preferential c -axis growth results in columnar grain structure perpendicular to the substrate, with grain widths varying from tens of nanometers to a few micrometers, depending on the method of synthesis. , In general, the surfaces of such columnar films are not planar. When a potential difference is applied across such films, the nonplanar surface morphology results in an inhomogeneous distribution of the electric field within the material.…”

“…The PSZT deposition required 4 h to produce a film of nominal 1200 nm thickness. Further details of the deposition process can be found in previous publications , and in the Supporting Information.…”

“…In the case of polycrystalline thin films, preferential c-axis growth results in columnar grain structure perpendicular to the substrate, with grain widths varying from tens of nanometers to a few micrometers, depending on the method of synthesis. 1,4 In general, the surfaces of such columnar films are not planar. When a potential difference is applied across such films, the nonplanar surface morphology results in an inhomogeneous distribution of the electric field within the material.…”

Alkali ratio control for lead-free piezoelectric thin films utilizing elemental diffusivities in RF plasma

“…CrystEngComm Paper formation of a PtSi layer during deposition at a high substrate temperature. 45 As a result, the as-deposited nano-crystalline platinum crystallizes into the thermodynamically stable (111) configuration on exposure to higher temperatures. The resulting KNN thin films show a strong c-axis (001) orientation with the absence of the KNN (101) peak.…”