Nano-optical devices and integration based on nanopattern replications and nanolithography

Wang, Jim J.; Chen, Lei; Tai, Stephen-W.; Deng, Xuegong; Sciortino, P.F.; Liu, Feng; Deng, Jiandong; Liu, Xiaoming; Nikolov, Anguel; Sinatore, Dino

doi:10.1117/12.570040

Cited by 4 publications

(2 citation statements)

References 11 publications

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“…NIL has already been shown to find potential applications in bio-chemical analysis systems [34,37], electronic storage media [34] and optical elements [37,38] and CD/DVD optical pick up units [39]. It can also be used for fabricating in-fiber gratings in optical fibers [38].…”

mentioning

confidence: 99%

Electrodeposition of CuNiW alloys: thin films, nanostructured multilayers and nanowires

Gupta

Podlaha

2010

J Appl Electrochem

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Electrodeposition operating conditions were determined for the deposition of copper-nickel-tungsten alloys and compositionally, multilayered deposits. Multilayered alloys with one layer rich in Cu and the other layer rich in NiW were fabricated as both thin films and nanowires. The electrolyte contained 0.6 M Na 3 C 6 H 5 O 7 , 0.2 M Na 2 WO 4 , 0.3 M NiSO 4 and variable CuSO 4 concentration at a pH of 8 adjusted with ammonium hydroxide at 70 ± 2°C. The deposit composition and current efficiency were characterized using rotating cylinder electrodes with and without a Hull configuration. Addition of Cu(II) to the electrolyte lowered the tungsten partial current density and hence the W wt% in the deposit. Thin film multilayered alloys, with a modulation in composition, were fabricated with pulse current deposition and conditions to selectively etch one layer was determined with a view towards fabricating nanotemplates. Nanowires with modulated composition were also demonstrated, electrodeposited into alumina nanoporous templates. However, the nanowire deposition was confounded by the formation of oxide during the modulation, and results herein recommend that the potential of the more noble step be more negative than -0.9 V versus SCE to avoid this situation, despite metallic alloy formation in unrecessed electrodes.

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confidence: 99%

Electrodeposition of CuNiW alloys: thin films, nanostructured multilayers and nanowires

Gupta

Podlaha

2010

J Appl Electrochem

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“…In NanoOpto corporation, we developed a nano-replication lithography platform based on UV curable and single-layer spin coating capable resists 32 . The nano-replication process produced nano-patterns with good uniformity across a 6"-in-dia substrate.…”

Section: Nano-structure Fabrications For Nano-opticsmentioning

confidence: 99%

Innovative nano-optical devices and optical integration using nano-fabrication technologies

et al. 2005

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We developed various optical devices and integrated optical devices based on innovative nano-optical structures and design. The nano-optical devices and integrated devices were fabricated through a nanomanufacturing platform based on wafer level nano-replication with mold and nano-pattern transfer by nano-lithography. The nano-replication process, which based on imprinting a single-layer spin-coated UV curable resist, achieved excellent nano-patterning fidelity and on-wafer uniformity with high-throughput. Excellent wafer level performance and yield were achieved. Nano-optic devices, such as, quarter wave plates and polarizers, and integrated nano-optical devices, such as monolithically integrated semi-isolators, were manufactured with the nano-manufacturing platform. The developed technology is suitable for highthroughput and low cost manufacturing needs for commercializing nano-structure based optical devices and integrated optical devices.

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A Novel Nano-Grating Structure of Polarizing Beam Splitters

Zhang

et al. 2006

Chinese Phys. Lett.

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Nano-optical devices and integration based on nanopattern replications and nanolithography

Cited by 4 publications

References 11 publications

Electrodeposition of CuNiW alloys: thin films, nanostructured multilayers and nanowires

Electrodeposition of CuNiW alloys: thin films, nanostructured multilayers and nanowires

Innovative nano-optical devices and optical integration using nano-fabrication technologies

A Novel Nano-Grating Structure of Polarizing Beam Splitters

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