2017
DOI: 10.1021/acsnano.7b06658
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Nano-electromechanical Switch Based on a Physical Unclonable Function for Highly Robust and Stable Performance in Harsh Environments

Abstract: A physical unclonable function (PUF) device using a nano-electromechanical (NEM) switch was demonstrated. The most important feature of the NEM-switch-based PUF is its use of stiction. Stiction is one of the chronic problems associated with micro- and nano-electromechanical system (MEMS/NEMS) devices; however, here, it was utilized to intentionally implement a PUF for hardware-based security. The stiction is caused by capillary and van der Waals forces, producing strong adhesion, which can be utilized to desig… Show more

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Cited by 38 publications
(22 citation statements)
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References 28 publications
(31 reference statements)
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“…Boodhoo et al [ 38 ] investigated the influence of the doping level on the gate voltage by preparing bilateral-gate Si NW transistors. Figure 10 shows the NEM-PUF structure prepared by Hwang and co-workers [ 79 ]. The device uses Si NWs as a moving electrode and the two gates (G1/G2) are symmetrically distributed.…”
Section: Reviewmentioning
confidence: 99%
“…Boodhoo et al [ 38 ] investigated the influence of the doping level on the gate voltage by preparing bilateral-gate Si NW transistors. Figure 10 shows the NEM-PUF structure prepared by Hwang and co-workers [ 79 ]. The device uses Si NWs as a moving electrode and the two gates (G1/G2) are symmetrically distributed.…”
Section: Reviewmentioning
confidence: 99%
“…Finite State Machine PUF (PUF‐FSM) proposed by Zhang , et al in [67] where the authors used employed FSMs to bind hardware IPs (HWIPs) to the FPGAs with PUFs to be used for IP protection. Nano‐electromechanical PUF (NEM‐PUF) is proposed by Hwang , et al in [68] where they exploited the mechanical actuation mismatches of a SiNW. In multiple‐valued logic PUF (MVL‐PUF) [69], Tao and Dubrova identified mismatches from the variation in current or voltage MVL comparators.…”
Section: Literature Reviewmentioning
confidence: 99%
“…However, both the above-mentioned approaches to form suspended channels encountered a mechanical instability, known as stiction, which is associated with the capillary force of chemicals during wet-etching [9]. Fortunately, this concern has been avoided by improved dry etching and supercritical drying [10][11][12][13]. The other concern during the suspension of channels is vertical stress associated with gravity.…”
Section: Introductionmentioning
confidence: 99%