1999
DOI: 10.1063/1.1149980
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Multipurpose high vacuum laser ablation/thin film deposition system

Abstract: An instrumental system is described that combines an apparatus for pulsed laser deposition (PLD) with a vacuum “suitcase” for transport of air-sensitive compounds. Laser ablation, plume diagnostics, and thin-film deposition are readily accomplished through a flexible design. The PLD apparatus consists of two cubes coupled via a bellows assembly and whose distance is easily changed pneumatically. For both the PLD apparatus and the vacuum suitcase, compact-design considerations have been implemented. Consequentl… Show more

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Cited by 4 publications
(1 citation statement)
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“…Of course it is not possible to use a container with a turbomolecular pump since the system has to be compact, moveable, and independent of power sources. Others have already developed a vacuum suitcase for these needs: Gomlak et al 1 assembled an apparatus for pulsed laser deposition with a vacuum suitcase for transport of air-sensitive compounds; Messerli et al 2 used it for the transfer of samples for scanning tunneling microscope imaging, and Jiricek et al 3 used it to transport samples for molecular-beam epitaxy. There is also a commerical small portable system that answers to this demand.…”
Section: Introductionmentioning
confidence: 99%
“…Of course it is not possible to use a container with a turbomolecular pump since the system has to be compact, moveable, and independent of power sources. Others have already developed a vacuum suitcase for these needs: Gomlak et al 1 assembled an apparatus for pulsed laser deposition with a vacuum suitcase for transport of air-sensitive compounds; Messerli et al 2 used it for the transfer of samples for scanning tunneling microscope imaging, and Jiricek et al 3 used it to transport samples for molecular-beam epitaxy. There is also a commerical small portable system that answers to this demand.…”
Section: Introductionmentioning
confidence: 99%