A new method of analysis for the simultaneous determination of the optical constants and the thickness of thin films is proposed. It requires measurements under normal incidence of the transmission and of the reflections from both sides of a thin film deposited on a nonabsorbing sbstrate. An algebraic inversion technique is developed involving a numerical interpolation procedure in the last step. There are no missing solutions. The physical solution can be isolated by a comparison with some film thickness estimates or by measurements in a wavelength range.
A method is used to investigate carbon removal pathways during metal film growth using organometallic precursors. The approach combines a time-of-flight mass spectrometer with a growth chamber from which substrates can be removed during real-time film growth. Consequently, evolving mass spectral signatures can be correlated with changing film properties. Although more general as a technique, results are presented for the photoassisted growth of Pt from CH 3 CpPt͑CH 3 ͒ 3 in a D 2 atmosphere. Here, a marked increase in deuterium/hydrogen exchange is clearly correlated with an increase in the Pt:C ratio for the metal films, as determined by x-ray photoelectron spectroscopy. However, results for growth with CH 3 CH 2 CpPt͑CH 3 ͒ 3 as well as ͑CH 3 ͒ 3 CCpPt͑CH 3 ͒ 3 suggest that while extensive D / H exchange can be a feature of the growth process, it is not a prerequisite for producing films with relatively high Pt:C ratios.
Results are reported on the Zintl phase material, K4In4Sb6, with respect to laser ablation and subsequent laser ionization/removal processes. A 308 nm laser pulse is used to ablate the Zintl compound, while a second laser ionizes ejected species within the extraction region of a time-of-flight mass spectrometer. With the second laser operating at 248 nm, selective ionization and removal of the potassium is clearly demonstrated. Such a strategy takes advantage of the different ionization potentials of K, In, and Sb, and implications for possible applications of this research to film growth are discussed.
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