Multimodal Sensing with a Three-Dimensional Piezoresistive Structure

Abstract

Sensors that reproduce the complex characteristics of cutaneous receptors in the skin have important potential in the context of artificial systems for controlled interactions with the physical environment. Multimodal responses with high sensitivity and wide dynamic range are essential for many such applications. This report introduces a simple, three-dimensional type of microelectromechanical sensor that incorporates monocrystalline silicon nanomembranes as piezoresistive elements in a configuration that enables separate, simultaneous measurements of multiple mechanical stimuli, such as normal force, shear force, and bending, along with temperature. The technology provides high sensitivity measurements with millisecond response times, as supported by quantitative simulations. The fabrication and assembly processes allow scalable production of interconnected arrays of such devices with capabilities in spatiotemporal mapping. Integration with wireless data recording and transmission electronics allows operation with standard consumer devices.

Contact Modulated Ionic Transfer Doping in All‐Solid‐State Organic Electrochemical Transistor for Ultra‐High Sensitive Tactile Perception at Low Operating Voltage

“…The development of highly sensitive flexible pressure sensors is particularly attractive for new and disruptive technologies such as cyber-physical systems, soft robotics, and wearable healthcare devices. Current flexible tactile sensors consist of organic/ polymeric thin films that exploit three main pressure sensing mechanisms-piezoresistive, [1,2] capacitive, [3,4] and piezoelectric. [5,6] Although they allow for good pressure sensitivity (0.7-100 kPa −1 ), [7][8][9] simple device architecture, and readout, they are still subjected to the limitation of high voltages/power consumption, inherent charge leakage, or parasitic noise from body and environmental sources.…”

Artificially innervated self-healing foams as synthetic piezo-impedance sensor skins

“…Moreover, the use of such 2D electrode patterns typically detects normal forces only. While there are reports on e-skins that detect both normal and shear forces 8,9,11,[13][14][15][16] , most of them require encapsulation with sandwiched structures to work (Table 1). There are also designs of piezoresistive material pillars to achieve the normal and shear-force sensing, but these are not self-healing 17 .…”

Wireless, implantable catheter-type oximeter designed for cardiac oxygen saturation

“…Other possibilities for future work include incorporation of multiple LEDs and additional wavelengths for additional measurement capabilities and by integrating collections of PDs for depth profiling. Additional options are in combinations with sensors of pressure (44,45) and flow (46,47) or for drug delivery, using concepts adapted from those recently reported for animal experiments in neuroscience (48)(49)(50).…”