Multi-Scale Insight into Inhibition Mechanism of Benzo Derivatives in Chemical Mechanical Polishing of Copper Film Based on Experiments and Theoretical Calculations
Abstract:To protect the copper (Cu) surfaces from corrosion during chemical mechanical polishing (CMP), selecting appropriate inhibitors are critical. Benzo and its derivatives are potential superior inhibitors due to their diverse heteroatoms and environmentally friendliness. In this study, benzothiazole (ABT), 2-benzothiazolamine (2-ABT) and 2-aminobenzimidazole (2-ABI) were used as inhibitors to investigate the effect of molecular structure on the inhibition performance through experimental and theoretical calculati… Show more
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