Chemical-mechanical synergies effects of multi-purpose pH regulators on C-, A-, and R-plane sapphire polishing

Zou, Yida; Niu, Xinhuan; Zhan, Ni; Liu, Jianghao; Li, Xinjie; He, Chao; Dong, Changxin; Shi, Yunhui

doi:10.1016/j.triboint.2024.109603

Tribology International

2024

DOI: 10.1016/j.triboint.2024.109603

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Chemical-mechanical synergies effects of multi-purpose pH regulators on C-, A-, and R-plane sapphire polishing

Yida Zou,

Xinhuan Niu,

Ni Zhan

et al.

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Chemical-mechanical synergies effects of multi-purpose pH regulators on C-, A-, and R-plane sapphire polishing

Cited by 3 publications

References 50 publications

Micro-mechanism of glycine action in tribochemical mechanical polishing of single-crystal sapphire substrate: Experimental and first-principles analysis

Micro-mechanism of glycine action in tribochemical mechanical polishing of single-crystal sapphire substrate: Experimental and first-principles analysis

Exploring the effectiveness of polyhydroxy complexing agents in sapphire chemical mechanical polishing: Combining experiments and theoretical calculation

Effects of organic compounds rich in phosphate functional groups as multifunctional inhibitors on copper film chemical-mechanical polishing properties: Combined experiment and theoretical calculation

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