Multi-Dimensional MEMS/Micro Sensor for Force and Moment Sensing: A Review

Liang, Qiaokang; Zhang, Dan; Coppola, Gianmarc; Wang, Yaonan; Sun, Wei; Ge, Yaojun

doi:10.1109/jsen.2014.2313860

Cited by 61 publications

(25 citation statements)

References 96 publications

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“…Force sensors provide force feedback in nanomanipulation 77,78 . Microelectromechanical systems (MEMSs) capacitive force sensors utilize comb structures to detect capacitance changes that are induced by externally applied forces 79,80 . A Nanorobotic manipulation inside SEM C Shi et al two-axis MEMS capacitive force sensor 81,82 and an improved six-axis capacitive force sensor 83 were constructed via deep reactive ion etching of silicon on insulator (SOI) substrates.…”

Section: Sensingmentioning

confidence: 99%

“…These capacitive force sensors are capable of measuring forces from a few nanonewtons to micronewtons. MEMS piezoresistive force sensors, which are formed by ion implantation, have also been developed for nanoscaled applications 77,79 . Piezoresistive force sensors were mounted on a nanomanipulator to provide high-accuracy force measurements that range from nanonewtons to millinewtons 84 .…”

Section: Sensingmentioning

confidence: 99%

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Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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Section: Sensingmentioning

confidence: 99%

Section: Sensingmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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“…Some of the most important design criteria are as follows [2], [10]: (1) Global Sensitivity and Minimum Stiffness, (2) Simple Minimum Volume, Especially Reduced Height, (3) Measurement Isotropy and Low Coupling Effects among Components, and (4) Small Error of Nonlinearity, Hysteresis and Repeatability. In this paper, a sophisticated EE structure is proposed based on cross-beams to fulfill the above criteria.…”

Section: Design Of the Sensormentioning

confidence: 99%

“…Main advantages of the contact approach include structural simplicity, immunity to covering oil film and optical properties of object, and the most common contact approach to roughness measurement is based on AFM. MEMS (Micro-Electromechanical Systems) devices benefit from miniaturization, low power, low cost, low weight, high performance, easy mass-production and integration, and they have evolved from academic exercises to many crucial integral components such as automotive electronics, medical equipment and smart portable electronics over the past two decades [2].…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Liang

Zhang

et al. 2015

Measurement Science Review

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Roughness, which can represent the trade-off between manufacturing cost and performance of mechanical components, is a critical predictor of cracks, corrosion and fatigue damage. In order to measure polished or super-finished surfaces, a novel touch probe based on three-component force sensor for characterizing and quantifying surface roughness is proposed by using silicon micromachining technology. The sensor design is based on a cross-beam structure, which ensures that the system possesses high sensitivity and low coupling. The results show that the proposed sensor possesses high sensitivity, low coupling error, and temperature compensation function. The proposed system can be used to investigate micromechanical structures with nanometer accuracy.

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“…The wide variety of configurations adopted in multi-component F/M sensors originates from the exploitation of various measurement principles or methods, such as capacitive, Piezoresistive, inductive, piezoelectric, magnetic and optical methods etc. [1].…”

Section: Introductionmentioning

confidence: 99%

Design and optimization of elastic element for extra-thin multi-component F/M sensor

Liang

Wang

et al. 2014

2014 IEEE International Conference on Information and Automation (ICIA)

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This paper proposes an extra-thin multicomponent F/M sensor with a novel E-type membrane EE (Elastic Element) structure. With the approach of SimulationDriven Production Development (SDPD), the preliminary design studies about the EE structure of the multi-component F/M sensor has been quickly performed. Rather than traditional verifying solutions and classical closed-form analysis techniques, the design and optimization based on SDPD ensures the process is performed more effectively and efficiently.

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Multi-Dimensional MEMS/Micro Sensor for Force and Moment Sensing: A Review

Cited by 61 publications

References 96 publications

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

Design and optimization of elastic element for extra-thin multi-component F/M sensor

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