Mueller polarimetry as a tool for detecting asymmetry in diffraction grating profiles

Novikova, Tatiana; Bulkin, Pavel; Попов, В. Н.; Ibrahim, Bicher Haj; Martino, A. De

doi:10.1116/1.3633693

Cited by 19 publications

(23 citation statements)

References 13 publications

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“…in software codes like "GSolver" or "Grating" [46]. Experimentally, this can be accomplished by Müller matrix polarimetry, a technique typically applied to characterize gratings in the optical regime [47][48][49][50][51][52][53][54][55]. To date, there has been no thorough theoretical study on how the grating affects polarization, and experimental studies are rather rare in the soft X-ray regime [38,[56][57][58].…”

Section: Beamline Performancementioning

confidence: 99%

Polarization control at the microscopic and electronic structure observatory

Moser¹,

Kilcoyne²,

Denlinger³

et al. 2019

Nuclear Instruments and Methods in Physics Research Section A:

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The new Microscopic and Electronic Structure Observatory (MAESTRO) at the Advanced Light Source (ALS) in Berkeley provides X-rays of variable polarization, produced by an elliptically polarized undulator (EPU), for angle resolved photoemission (ARPES) and photoemission electron microscopy (PEEM) experiments. The interpretation of photoemission data, in particular of dichroism effects in ARPES, requires the precise knowledge of the exact polarization state. Numerical simulations show that the first harmonics of the EPU at MAESTRO provides soft X-rays of almost 100 % on axis polarization. However, the higher harmonics as well as the downstream optical elements of the beamline, have a considerable impact on the polarization of the light delivered to the experimental end-station. Employing a simple reflective polarimeter, the polarization is characterized for variable EPU and beamline settings and the overall degree of polarization in the MAESTRO end-stations is estimated to be on the order of 83 %.

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Section: Beamline Performancementioning

confidence: 99%

Polarization control at the microscopic and electronic structure observatory

Moser¹,

Kilcoyne²,

Denlinger³

et al. 2019

Nuclear Instruments and Methods in Physics Research Section A:

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“…[1][2][3][4][5]. This technique analyzes the changes of polarization states of incident light reflected/transmitted/ scattered by a sample.…”

Section: Introductionmentioning

confidence: 99%

Complementary analysis of Mueller-matrix images of optically anisotropic highly scattering biological tissues

Borovkova

Peyvasteh

Dubolazov

et al. 2018

J. Eur. Opt. Soc.-Rapid Publ.

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Background: Using optical techniques for tissue diagnostics (so-called 'optical biopsy') has been a subject of extensive research for many years. Various groups have been exploring different spectral and/or imaging modalities (e.g. diffuse reflectance spectroscopy, autofluorescence, Raman spectroscopy, optical coherence tomography (OCT), polarized light microscopy, etc.) for biomedical applications. In this paper, we report on using multi-wavelength imaging Mueller polarimetry combined with an appropriated image post-processing for the detection of tissue malignancy. Methods: We investigate a possibility of complementary analysis of Mueller matrix images obtained for turbid tissue-like scattering phantoms and excised human normal and cancerous colorectal tissue samples embedded in paraffin. Combined application of correlation, fractal and statistical analysis was employed to assess quantitatively the polarization-inhomogeneous scattered fields observed at the surface of tissue samples. Results: The combined analysis of the polarimetric images of paraffin-embedded tissue blocks has proved to be an efficient tool for the unambiguous detection of tissue malignant transformation. A fractal structure was clearly observed at spatial distributions of depolarization of light scattered in healthy tissues in a visible range of spectrum, while corresponding distributions for cancerous tissues did not show such dependence. We demonstrate that paraffin does not destroy a fractal structure of spatial distribution of depolarization. Thus, the loss of fractality in spatial distributions of depolarization for cancerous tissue is related to the structural changes in the tissue sample induced by cancer itself and, therefore, may serve as a marker of the disease. Conclusion: The obtained results emphasize that a combined use of statistical, correlation and fractal analysis for the Mueller-matrix image post-processing is an effective approach for an assessment of variations of optical properties in turbid tissue-like scattering media and biological tissues, with a high potential to be transferred to clinical practice for screening cancerous tissue samples.

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“…Since the zeroth-order diffraction usually has a large intensity than higher orders, the measurement provides a good signal-tonoise ratio. In addition, 16 elements of a 4 × 4 Mueller matrix provide much more information than a single intensity in angle-resolved scatterometry, and moreover, the overlay displacement introduces a composite structural asymmetry [17][18][19][20][21], which makes MME a good candidate for the DBO metrology.…”

Section: Introductionmentioning

confidence: 99%

Robust overlay metrology with differential Mueller matrix calculus

Chen

Jiang

et al. 2017

Opt. Express

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Overlay control is of vital importance to good device performances in semiconductor manufacturing. In this work, the differential Mueller matrix calculus is introduced to investigate the Mueller matrices of double-patterned gratings with overlay displacements, which helps to reveal six elementary optical properties hidden in the Mueller matrices. We find and demonstrate that, among these six elementary optical properties, the linear birefringence and dichroism, LB' and LD', along the ± 45° axes show a linear response to the overlay displacement and are zero when the overlay displacement is absent at any conical mounting. Although the elements from the two 2 × 2 off-diagonal blocks of the Mueller matrix have a similar property to LB' and LD', as reported in the literature, we demonstrate that it is only valid at a special conical mounting with the plane of incidence parallel to grating lines. The better property of LB' and LD' than the Mueller matrix elements of the off-diagonal blocks in the presence of overlay displacement verifies them to be a more robust indicator for the diffraction-based overlay metrology.

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Mueller polarimetry as a tool for detecting asymmetry in diffraction grating profiles

Cited by 19 publications

References 13 publications

Polarization control at the microscopic and electronic structure observatory

Polarization control at the microscopic and electronic structure observatory

Complementary analysis of Mueller-matrix images of optically anisotropic highly scattering biological tissues

Robust overlay metrology with differential Mueller matrix calculus

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