MOS Capacitor Driven Silicon Microring Resonator with Large Wavelength Tunability

Hsu, Wei-Che; Kupp, Benjamin; Trotter, Cade; Nujhat, Nabila; Conley, John F.; Wang, Alan X.

doi:10.1364/cleo_si.2022.sth4g.2

Conference on Lasers and Electro-Optics 2022

DOI: 10.1364/cleo_si.2022.sth4g.2

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MOS Capacitor Driven Silicon Microring Resonator with Large Wavelength Tunability

Wei-Che Hsu¹,

Benjamin Kupp²,

Cade Trotter³

et al.

Abstract: We demonstrated a silicon microring resonator driven by high mobility titanium-doped indium oxide MOS capacitor. It achieved an unprecedented wavelength tunability of 480 pm/V with field-effect mobility of 70 cm2V-1s-1 in the gate.

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MOS Capacitor Driven Silicon Microring Resonator with Large Wavelength Tunability

Abstract: We demonstrated a silicon microring resonator driven by high mobility titanium-doped indium oxide MOS capacitor. It achieved an unprecedented wavelength tunability of 480 pm/V with field-effect mobility of 70 cm2V-1s-1 in the gate.

Cited by 0 publications

References 6 publications

No citations

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