Monte Carlo modeling of radio-frequency breakdown in argon

Abstract

This paper contains results of the detailed simulation study of the breakdown in low-pressure radio-frequency argon discharges. Calculations were performed by using a Monte Carlo code including electrons only, assuming that the influence of heavy particles is negligible. The obtained results are in a good qualitative agreement with the available experimental data and clearly show multivalued nature of the left-hand branches of the breakdown voltage curves. Physical processes defining the breakdown conditions are analyzed based on the spatial profiles of electron density, local mean energy, number of elastic and ionization collisions. Under conditions where two breakdown values exist one could identify two regimes and two different balances between electron losses and production. From the dependence of the breakdown voltage on the product of the pressure and the interelectrode distance and frequency over the gas number density, similarity laws for radio-frequency breakdown have been reexamined.

Gas breakdown in radio-frequency field within MHz range: a review of the state of the art

“…The relationship between breakdown voltage and frequency in the MRF range was obtained by his code. Puač et al [56,57] also used the Monte Carlo method to study the breakdown characteristics of argon and oxygen driven by 13.56 MHz RF power, and the corresponding Paschen curve is simulated. Qiu et al [58] found that the role of photon-emission processes is shown to be important for large-area electrode configurations of air atmospherics with Monte Carlo simulation and experiment.…”

Electron power absorption mode transition in capacitively coupled Ar/CF4 discharges: hybrid modeling investigation

“…MC model is useful for studying various kinds of discharges [44]. In this paper, the eMCs module is a 1d-3v (one-dimensional in space and three-dimensional in velocity) model, which consists of two parts: bulk electron Monte Carlo (MC) and secondary electron MC.…”

Simulation of the statistical and formative time delay of Townsend‐mechanism‐governed breakdown in argon at low pressure

“…Electric breakdown of gases, in general, has been widely studied in the literature. [14][15][16][17][18][19][20][21][22][23][24] For instance, the Monte Carlo method of electron transport has been used to determine the breakdown criterion for the low-pressure Townsend breakdown in helium and investigate electron bursts under the homogeneous electric field. [14] The radio-frequency breakdown in low-pressure argon has been studied in Reference [15], while low-pressure Townsend discharge in hydrogen has been modelled in Reference [16].…”

“…[14][15][16][17][18][19][20][21][22][23][24] For instance, the Monte Carlo method of electron transport has been used to determine the breakdown criterion for the low-pressure Townsend breakdown in helium and investigate electron bursts under the homogeneous electric field. [14] The radio-frequency breakdown in low-pressure argon has been studied in Reference [15], while low-pressure Townsend discharge in hydrogen has been modelled in Reference [16]. Besides low pressure, particle models have also been used for modelling an atmospheric-pressure streamer breakdown in References [17][18][19].…”