Gas breakdown in radio-frequency field within MHz range: a review of the state of the art

Jiang, Wei; Wu, Hao; Wang, Zhijiang; Yi, Lin; Zhang, Ya

doi:10.1088/2058-6272/aca648

Cited by 5 publications

(4 citation statements)

References 101 publications

(152 reference statements)

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“…The general scheme of the methane conversion by the microwave plasma was considered in the aboveliterature [2][3][4][5]. This scheme can be presented by the combination of the following main reactions:…”

Section: Resultsmentioning

confidence: 99%

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Synthesis of Acetylene and Benzene in Controlled Methane-Plasma System

Kapustin,

Grinvald,

Agrba

et al. 2023

Preprint

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High-energy chemistry is a special way of accelerating chemical reactions by transferring large portions of energy to individual molecules. The synthesis of acetylene and benzene is a valuable chemical product and used in technologies for the many organic products obtaining: synthetic rubber, vinyl chloride, acrylonitrile, ethylene, styrene. The article proposes an original version of the experimental setup and technology for plasma-activated methane conversion. Was tested a system of two connected reactors, one of which (the “cold” reactor) was displaced out of the microwave zone, and the other (the “hot” reactor) was located inside this zone. The surface of the “hot” reactor (which means its walls) was purged with argon at the selected temperature and flow rate. As a result, carbon phase structures were concentrated in the “cold” reactor, and organics (acetylene and benzene) were synthesized in the near-surface area of the “hot” reactor. Heat removal from the “hot” walls of the reactor by gas purging provided temperature control of the methane microwave plasma reforming process. The conversion of methane into acetylene and other products depends on the extremum point at the maximum temperature and pressure of the feeding gas stream in the “hot” reactor. In this system, a low-temperature IR optical cell made it possible to identify and extract the resulting conversion products.

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Section: Resultsmentioning

confidence: 99%

“…Thus, the lighter electrons and some ions quickly accelerate to higher velocities than the heavier neutral molecules, so the kinetic energy of electrons is much higher than the bulk neutrals causing nonequilibrium plasma [4]. Since such a plasma does not raise the temperature of the bulk gas, it is termed as cold or non-thermal plasma [5].…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Acetylene and Benzene in Controlled Methane-Plasma System

Kapustin,

Grinvald,

Agrba

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

“…In recent years, the peak power of high-power microwave has reached the GW level, which easily causes breakdown on the vacuum side or even the gas side of the dielectric window [1][2][3][4][5][6][7][8][9][10][11]. The secondary electron multipactor is one of the dominant reactions of breakdown on the vacuum side of the dielectric window, i.e.…”

Section: Introductionmentioning

confidence: 99%

Effect of desorbed gas on microwave breakdown on vacuum side of dielectric window

ZHAO 赵,

LIU 刘,

WANG 王

et al. 2024

Plasma Sci. Technol.

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The gas desorbed from the dielectric surface has a great influence on the characteristics of microwave breakdown on the vacuum side of the dielectric window. In this paper, the dielectric surface breakdown is described by using the electromagnetic particle-in-cell-Monte Carlo collision (PIC-MCC) model. The process of desorption of gas and its influence on the breakdown characteristics are studied. The simulation results show that, due to the accumulation of desorbed gas, the pressure near the dielectric surface increases in time, and the breakdown mechanism transitions from secondary electron multipactor to collision ionization. More and more electrons generated by collision ionization drift to the dielectric surface, so that the amplitude of self-organized normal electric field increases in time and sometimes points to the dielectric surface. Nevertheless, the number of secondary electrons emitted in each microwave cycle is approximately equal to the number of primary electrons. In the early and middle stages of breakdown, the attenuation of the microwave electric field near the dielectric surface is very small. However, the collision ionization causes a sharp increase in the number density of electrons, and the microwave electric field decays rapidly in the later stage of breakdown. Compared with the electromagnetic PIC-MCC simulation results, the mean energy and number of electrons obtained by the electrostatic PIC-MCC model are overestimated in the later stage of breakdown because it does not take into account the attenuation of microwave electric field. The pressure of the desorbed gas predicted by the electromagnetic PIC-MCC model is close to the measured value, when the number of gas atoms desorbed by an incident electron is taken as 0.4.

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“…as pressure p, gap distance d, driving frequency f and electrode properties [10][11][12]. Capacitively coupled plasma sources are typically used for dry etching in the field of semiconductor chip manufacturing [13][14][15], and a comprehensive understanding of the breakdown characteristics of low-pressure radiofrequency (rf) discharges would facilitate the optimization of their operating conditions [16,17]. Korolov et al [18,19] and Lisovskiy et al [20,21] have experimentally measured rf breakdown curves under various conditions, demonstrating the dependence of rf breakdown on factors such as gas species and discharge dimensions.…”

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confidence: 99%

Transition in radio frequency gas breakdown with a transverse magnetic field

Yang,

Wang,

Zheng

et al. 2023

Plasma Sources Sci. Technol.

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This paper presents the quantification of gas breakdown voltages in low-pressure argon capacitive radio frequency (rf) discharges in the presence of an external transverse magnetic field via fully kinetic particle-in-cell/Monte Carlo collision simulations. It is found that as the magnetic field increases, the left branch of the breakdown curve, a double-valued rf breakdown voltage regime, shifts toward a lower-pressure region. A split of the breakdown curve into lower and upper branches occurs when the external magnetic field rises to a critical value. The observed abrupt transition of rf breakdown behaviors can be understood based on the electron kinetics behaviors, with the consideration of the enhanced ionization and electron confinement induced by E × B drift motions. An improved analytical model is developed, which can estimate the critical magnetic field required for the occurrence of the transition.

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Gas breakdown in radio-frequency field within MHz range: a review of the state of the art

Cited by 5 publications

References 101 publications

Synthesis of Acetylene and Benzene in Controlled Methane-Plasma System

Synthesis of Acetylene and Benzene in Controlled Methane-Plasma System

Effect of desorbed gas on microwave breakdown on vacuum side of dielectric window

Transition in radio frequency gas breakdown with a transverse magnetic field

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