Monolithic integration of an infrared photon detector with a MEMS-based tunable filter

Musca, Charles; Antoszewski, J.; Winchester, K.J.; Keating, Adrian; Nguyen, T.; Silva, Dilusha; Dell, John; Faraone, Lorenzo; Mitra, P.; Beck, Jeff; Skokan, M. R.; Robinson, J.E.

doi:10.1109/led.2005.859651

Cited by 57 publications

(35 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The unactuated electrode separation gap in this work is 45 μm compared with 41.5 μm reported in Ref. 50, and for a given voltage, the electrostatic attraction force between the electrodes is approximately inversely proportional to the square of mutual separation. To decrease the actuation voltage requirements, future design iterations could include more flexible actuators, greater electrode area overlap, and/or a design where the gap between the electrodes is de-coupled and not necessarily equal to the separation between the suspended meta-atom membrane and the gold ground plane.…”

Section: Resultssupporting

confidence: 48%

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

et al. 2017

View full text Add to dashboard Cite

The realization of high-performance tunable absorbers for terahertz frequencies is crucial for advancing applications such as single-pixel imaging and spectroscopy. Based on the strong position sensitivity of metamaterials' electromagnetic response, we combine meta-atoms that support strongly localized modes with suspended flat membranes that can be driven electrostatically. This design maximizes the tunability range for small mechanical displacements of the membranes. We employ a micro-electromechanical system technology and successfully fabricate the devices. Our prototype devices are among the best-performing tunable THz absorbers demonstrated to date, with an ultrathin device thickness (~1/50 of the working wavelength), absorption varying between 60% and 80% in the initial state when the membranes remain suspended, and fast switching speed (~27 μs). The absorption is tuned by an applied voltage, with the most marked results achieved when the structure reaches the snap-down state. In this case, the resonance shifts by 4200% of the linewidth (14% of the initial resonance frequency), and the absolute absorption modulation measured at the initial resonance can reach 65%. The demonstrated approach can be further optimized and extended to benefit numerous applications in THz technology.

show abstract

Section: Resultssupporting

confidence: 48%

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

et al. 2017

View full text Add to dashboard Cite

show abstract

“…A number of recent developments in the area of MEMS-based tuneable IR detectors have the potential to deliver voltage-tuneable multi-band infrared FPAs. These technologies have been developed as part of the DARPA--funded adaptive focal plane array (AFPA) program, and have demonstrated multi-spectral tuneable IR detector structures [73][74][75][76].…”

Section: Adaptive Focal Plane Arraysmentioning

confidence: 99%

Infrared Detectors for the Future

Rogalski

2009

Acta Phys. Pol. A

124

View full text Add to dashboard Cite

In the paper, fundamental and technological issues associated with the development and exploitation of the most advanced infrared detector technologies are discussed. In this class of detectors both photon and thermal detectors are considered. Special attention is directed to HgCdTe ternary alloys on silicon, type-II superlattices, uncooled thermal bolometers, and novel uncooled micromechanical cantilever detectors. Despite serious competition from alternative technologies and slower progress than expected, HgCdTe is unlikely to be seriously challenged for high-performance applications, applications requiring multispectral capability and fast response. However, the nonuniformity is a serious problem in the case of LWIR and VLWIR HgCdTe detectors. In this context, it is predicted that type-II superlattice system seems to be an alternative to HgCdTe in long wavelength spectral region. In well established uncooled imaging, VO x microbolometer arrays are clearly the most used technology. In spite of successful commercialization of uncooled microbolometers, the infrared community is still searching for a platform for thermal imagers that combine affordability, convenience of operation, and excellent performance. Recent advances in microelectromechanical systems have led to the development of uncooled IR detectors operating as micromechanical thermal detectors. Between them the most important are biomaterial microcantilevers.

show abstract

“…It can be seen that for a total bowing above 30 nm the peak transmission drops significantly (low quantum efficiency). The variation of FWHM with bowing has an analytical form given by 11 : where dk R is the theoretical Fabry-Pérot bandwidth due to reflectivity of the mirrors and dd is the center-to-edge bowing of the movable mirror.…”

Section: Optical Considerationsmentioning

confidence: 99%

“…8 Recent advances by our team have demonstrated successful release and tuning of a MEMS Fabry-Pérot optical filter which has been monolithically integrated on an infrared Hg x Cd 1-x Te photoconductor using only low-temperature processes. [11][12][13] In this work we discuss the design issues associated with our integrated microspectrometer, presenting simple, first-order analytical forms which can guide the design. We demonstrate the wavelength tuning characteristics of our microspectrometer, which is achieved by electrostatic deflection of the suspended MEMS dielectric mirror.…”

Section: Introductionmentioning

confidence: 99%

Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers

Keating

Antoszewski

Silva

et al. 2008

Journal of Elec Materi

Self Cite

View full text Add to dashboard Cite

Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry-Pérot filter and a Hg x Cd 1-x Te-based infrared detector are discussed and measured results presented. The microspectrometers are designed to operate in the 1.5 lm to 2.6 lm wavelength range. Design equations are presented which account for the mechanical and optical characteristics of the device. Measurements indicate linewidths as narrow as 55 nm, switching times of 40 ls, and a tuning range of 380 nm, which is limited by snap-down. Optical characterization of the distributed Bragg mirrors and the Fabry-Pérot filter are presented, and these are shown to be in good agreement with simple first-order analytical models. Bowing of the movable Fabry-Pérot mirror due to stress gradients is identified as the dominant source of linewidth broadening.

show abstract

Monolithic integration of an infrared photon detector with a MEMS-based tunable filter

Cited by 57 publications

References 7 publications

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial

Infrared Detectors for the Future

Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers

Contact Info

Product

Resources

About