Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers

Keating, Adrian; Antoszewski, J.; Silva, Dilusha; Winchester, K.J.; Nguyen, T.; Dell, John; Musca, Charles; Faraone, Lorenzo; Mitra, P.; Beck, Jeff; Skokan, M. R.; Robinson, J.E.

doi:10.1007/s11664-008-0526-0

Cited by 26 publications

(7 citation statements)

References 17 publications

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“…The MRG microspectrometer [1,2], as illustrated in figure 1(a) and (b), consists of a MEMS tunable Fabry-Perot filter mounted optically ahead of an infrared photodetector. Electrostatic actuation allows the top mirror to be moved downwards in figure 1, thus decreasing the mirror spacing and, thereby, shifting the optical pass-band of the spectrometer.…”

Section: Principle and Implementationmentioning

confidence: 99%

Towards longwave infrared tunable filters for multispectral thermal imaging applications

Mao

Silva²,

Martyniuk³

et al. 2014

Proceedings of the 2014 International Conference on Quantitative InfraRed Thermography

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Many thermal imaging applications stand to gain from the inclusion of multispectral capabilities in the long wave infrared (LWIR). While infrared spectral imaging systems presently exist, the addition of multispectral capabilities will provide a number of advantages, including the ability to accurately quantify the temperature distribution a scene, and the potential for dramatically improved target identification using spectral processing algorithms. We report here on our microspectrometer technology, based on electrically tuneable Fabry-Perot filters, which is moving towards implementation in the LWIR (8 -12 micron wavelength) for multispectral thermal imaging applications.

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Section: Principle and Implementationmentioning

confidence: 99%

Towards longwave infrared tunable filters for multispectral thermal imaging applications

Mao

Silva²,

Martyniuk³

et al. 2014

Proceedings of the 2014 International Conference on Quantitative InfraRed Thermography

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“…Firstly, a stress-balancing layer of thin, compressive, SiN X is placed on the mirror. Secondly, an oxygen plasma ash is used, post-fabrication, to induce a second order curvature reduction in the mirror [3]. Using this technique, as seen in Fig.…”

Section: Principle and Implementation Of The Microspectrometermentioning

confidence: 99%

A novel microspectrometer technology for IR spectral imaging applications

Silva¹,

Antoszewski²,

Nguyen³

et al. 2012

Proceedings of the 2012 International Conference on Quantitative InfraRed Thermography

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Including multi/hyper spectral capabilities into existing infrared imaging systems is of great significance, for military as well as civilian applications. While infrared spectral imaging systems presently exist, the spectrometer component is usually made of bulk-optics, which require macroscopic motion and, at times, require high voltages to tune the wavelength. As a result, their utility, particularly in airborne applications, is hindered by the bulk, cost, high computational load, and high power consumption. Our work aims to address the above limitations by implementing the entire spectrometer, at the focal-plane level, using microelectromechanical systems (MEMS) technologies. This approach has several advantages over existing schemes including, reduction of cost and bulk of the system, significantly reduced voltage and power requirements, and enabling the intelligent acquisition of only data relevant to the application. We report on our microspectrometer technology, based on Fabry Perot tunable filters, compatible with large format infrared focal plane arrays, with potential for implementation as a spectrometer array at the focal plane. Our technology is inherently low voltage, which makes it compatible with focal plane array (FPA) readout circuits. Single device and small array configurations have already been demonstrated, with the array forms targeted towards multispectral and hyperspectral imaging applications. We have also demonstrated linear variable filter array technologies suited to application in process control in moving production line environments.

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“…The λ∕4-thickness 28 and optical constants [29][30][31][32] for the thin-films required for applications in the technologically important MWIR and LWIR bands are listed in Table 1. Ge thin-films have been previously explored by several research groups 2,12,21,27,[33][34][35][36] to fabricate DBRs in the IR region. In particular, our group at The University of Western Australia 12,21,27,33,34 and InfraTec GmbH 2,36 have used Ge thin-films as Table 1 Material parameters for the design of MWIR and LWIR DBRs at center wavelengths of 4 and 10 μm, respectively.…”

Section: Introductionmentioning

confidence: 99%

Ge/BaF2 thin-films for surface micromachined mid-wave and long-wave infrared reflectors

Gill

Tripathi

Keating

et al. 2022

J. Optical Microsystems

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High performance distributed Bragg reflectors (DBRs) are key elements to achieving high finesse MEMS-based Fabry-Pérot interferometers (FPIs). Suitable mechanical parameters combined with high contrast between the refractive indices of the constituent optical materials are the main requirements. In this paper, Germanium (Ge) and barium fluoride (BaF 2 ) optical thin-films have been investigated for mid-wave infrared (MWIR) and long-wave infrared (LWIR) filter applications. Thin-film deposition and fabrication processes were optimised to achieve mechanical and optical properties that provide flat suspended structures with uniform thickness and maximum reflectivity. Ge-BaF 2 -Ge 3-layer solid-material DBRs have been fabricated that matched the predicted simulation performance, although a degradation in performance was observed for wavelengths beyond 10 μm that is associated with optical absorption in the BaF 2 material. Ge-Air-Ge 3-layer air-gap DBRs, in which air rather than BaF 2 served as the low refractive index layer, were realized to exhibit layer flatness at the level of 10 to 20 nm across lateral DBR dimensions of several hundred micrometers. Measured DBR reflectance was found to be ≳90% over the entire wavelength range of the MWIR band and for the LWIR band up to a wavelength of 11 μm. Simulations based on the measured DBR reflectance indicates that MEMS-based FPIs are able to achieve a peak transmission of ≳90% over the entire MWIR band and up to 10 μm in the LWIR band, with a corresponding spectral passband of ≲50 nm in the MWIR and <80 nm in the LWIR.

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Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers

Cited by 26 publications

References 17 publications

Towards longwave infrared tunable filters for multispectral thermal imaging applications

Towards longwave infrared tunable filters for multispectral thermal imaging applications

A novel microspectrometer technology for IR spectral imaging applications

Ge/BaF2 thin-films for surface micromachined mid-wave and long-wave infrared reflectors

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