Modelling of an intermediate pressure microwave oxygen discharge reactor: from stationary two-dimensional to time-dependent global (volume-averaged) plasma models

Ke­man­eci, Efe; Carbone, E.; Jimenez-Diaz, M.; Graef, Wouter; Rahimi, Sara; Dijk, Jan van; Kroesen, G.M.W.

doi:10.1088/0022-3727/48/43/435203

Cited by 13 publications

(27 citation statements)

References 89 publications

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“…The numerical density values are still in the same order and the usage of any edge-to-centre ratios do not lead better agreement with the considered measurements. Compared with the earlier assumption of about 0.05 in the edgeto-volume-averaged formalism [14], the derived edgeto-centre ratio is smaller by a factor of about 0.17. A factor of difference between the edge-to-centre and edge-to-volume-averaged formalisms is about 0.5.…”

Section: Resultscontrasting

confidence: 77%

“…The derivations are often compared to their analogues used in the low-pressure radio-frequency plasma. For the sake of comparison, an edge-to-centre formalism is adapted, in contrast to an earlier study [14].…”

Section: The Physical Modelmentioning

confidence: 99%

“…The subscript " V " represents the chemical reactions inside the plasma volume and " W " represents the wall losses due to the net mass flow as well as the net ion and neutral wall flux. The sets of species -Ar or O 2 -and the chemical reactions are adapted from earlier studies [12,14,50,51] and they are tabulated in B. The flow-in rate of the feeding gas -either Ar or O 2 in the current studydue to the net mass flow rate Q (sccm) is R F-in…”

Section: Volume-averaged Particle Continuity Equationmentioning

confidence: 99%

“…One-dimensional models are used for the axial [4][5][6] as well as radial characteristics [7] and complemented with a series of zero-dimensional kinetic models [8,9] to provide a wider insight into various aspects. A variety of more detailed models are developed for a feeding gas of argon [10][11][12], hydrogen [13] and oxygen [14] that are often associated with numerically expensive simulations. A computationally efficient zerodimensional alternative is a transient global model that additionally averages over the position variable of the phase space.…”

Section: Introductionmentioning

confidence: 99%

“…The parameters are mostly obtained from the corresponding reference. * Adapted from [14]. * * It is estimated with a lower value than the calculation by [11] due to the structural differences.…”

Section: Introductionmentioning

confidence: 99%

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A global model of cylindrical and coaxial surface-wave discharges

Kemaneci

Mitschker

Rudolph

et al. 2017

J. Phys. D: Appl. Phys.

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A volume-averaged global model is developed to investigate surface-wave discharges inside either cylindrical or coaxial structures. The neutral and ion wall flux is self-consistently estimated based on a simplified analytical description both for electropositive and electronegative plasmas. The simulation results are compared with experimental data from various discharge setups of either argon or oxygen, measured or obtained from literature, for a continuous and a pulse-modulated power input. A good agreement is observed between the simulations and the measurements. The calculations show that the wall flux often substantially contributes to the net loss rates of the individual species.

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Section: Resultscontrasting

confidence: 77%

Section: The Physical Modelmentioning

confidence: 99%

Section: Volume-averaged Particle Continuity Equationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

A global model of cylindrical and coaxial surface-wave discharges

Kemaneci

Mitschker

Rudolph

et al. 2017

J. Phys. D: Appl. Phys.

Self Cite

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PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth

de los Arcos,

Awakowicz,

Benedikt

et al. 2023

Plasma Processes & Polymers

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This feature article presents recent results on the analysis of plasma/polymer interactions and the nucleation of ultra‐thin plasma films on polymeric substrates. Because of their high importance for the understanding of such processes, in situ analytical approaches of the plasma volume as well as the plasma/substrate interfaces are introduced before the findings on plasma surface chemistry. The plasma activation of polymeric substrates is divided into the understanding of fundamental processes on model substrates and the relevance of polymer surface complexity. Concerning thin film nucleation and growth, both plasma‐enhanced chemical vapor deposition and plasma‐enhanced atomic layer deposition processes as well as the combination of both processes are considered both for model substrates and technical polymers. Based on the comprehensive presentation of recent results, selective perspectives of this research field are discussed.

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Model analysis of atmospheric non-thermal plasma for methane abatement in a gas phase dielectric barrier discharge reactor

Molteni

Donazzi

2020

Chemical Engineering Science

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Modelling of an intermediate pressure microwave oxygen discharge reactor: from stationary two-dimensional to time-dependent global (volume-averaged) plasma models

Cited by 13 publications

References 89 publications

A global model of cylindrical and coaxial surface-wave discharges

A global model of cylindrical and coaxial surface-wave discharges

PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth

Model analysis of atmospheric non-thermal plasma for methane abatement in a gas phase dielectric barrier discharge reactor

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